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公开(公告)号：US20060147145A1
公开(公告)日：2006-07-06
申请号：US10527214
申请日：2003-09-10
IPC分类号： G02F1/035
CPC分类号： G02F1/0305 , G02F1/0316 , G02F1/225
摘要： An optical modulator in which stabilized driving is realized over a long time by relaxing stress generated in a recess formed in the surface of a substrate in the optical modulator and controlling deterioration of optical modulation control caused by stress-strain in the substrate including an optical waveguide. The optical modulator comprises a substrate of a material exhibiting electrooptic effect, an optical waveguide (4) provided on the substrate, and control electrodes (20-25) for controlling the phase of light being guided through the optical waveguide characterized in that a recess (12) is provided in the surface of the substrate for forming the control electrodes, and the control electrode (24) being formed on the recess is provided with a stress relaxing means.
摘要翻译： 一种光调制器，其特征在于，通过在形成于所述光调制器的基板的表面上形成的凹部中产生的应力，在长时间内实现稳定的驱动，并控制由包括光波导的基板中的应力应变引起的光调制控制的劣化 。 光学调制器包括具有电光效应的材料的衬底，设置在衬底上的光波导（4）和用于控制通过光波导引导的光的相位的控制电极（20-25），其特征在于，凹部 12）设置在用于形成控制电极的基板的表面中，并且形成在凹部上的控制电极（24）设置有应力缓和装置。
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公开(公告)号：US07292739B2
公开(公告)日：2007-11-06
申请号：US10527214
申请日：2003-09-10
IPC分类号： G02F1/035
CPC分类号： G02F1/0305 , G02F1/0316 , G02F1/225
摘要： An optical modulator in which stabilized driving is realized over a long time by relaxing stress generated in a recess formed in the surface of a substrate in the optical modulator and controlling deterioration of optical modulation control caused by stress-strain in the substrate including an optical waveguide. The optical modulator comprises a substrate of a material exhibiting electrooptic effect, an optical waveguide (4) provided on the substrate, and control electrodes (20-25) for controlling the phase of light being guided through the optical waveguide characterized in that a recess (12) is provided in the surface of the substrate for forming the control electrodes, and the control electrode (24) being formed on the recess is provided with a stress relaxing means.
摘要翻译： 一种光调制器，其特征在于，通过在形成于所述光调制器的基板的表面上形成的凹部中产生的应力，在长时间内实现稳定的驱动，并控制由包括光波导的基板中的应力应变引起的光调制控制的劣化 。 光学调制器包括具有电光效应的材料的衬底，设置在衬底上的光波导（4）和用于控制通过光波导引导的光的相位的控制电极（20-25），其特征在于，凹部 12）设置在用于形成控制电极的基板的表面中，并且形成在凹部上的控制电极（24）设置有应力缓和装置。
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公开(公告)号：US20140254972A1
公开(公告)日：2014-09-11
申请号：US14233709
申请日：2012-07-19
IPC分类号： G02F1/035
CPC分类号： G02F1/035 , G02B2006/1204 , G02B2006/1218 , G02F1/0123 , G02F2201/07 , G02F2202/06 , G02F2202/20 , G02F2203/21
摘要： An object of the present invention is to provide a manufacturing method of an optical waveguide element whose DC drift is suppressed, and to provide a manufacturing method of an optical waveguide element, capable of adjusting DC drift in the middle of manufacturing processes so as to improve a fabrication yield. The method of manufacturing an optical waveguide element comprises a step of forming an optical waveguide in a substrate having an electro-optic effect, a step of forming a buffer layer, and a step of forming an electrode, in which one stage or a plurality of stages of an interface diffusion layer heat adjustment step (S1, S2) for adjusting a concentration distribution of a specific substance in the buffer layer by heating is included after the buffer layer is formed.
摘要翻译： 本发明的目的是提供一种抑制了直流漂移的光波导元件的制造方法，提供能够在制造工序中间调整直流漂移的光波导元件的制造方法，从而提高 制造产量。 制造光波导元件的方法包括在具有电光效应的基板中形成光波导的步骤，形成缓冲层的步骤和形成电极的步骤，其中一个或多个 在缓冲层形成之后，包括用于通过加热来调节缓冲层中的特定物质的浓度分布的界面扩散层热调节步骤（S1，S2）的阶段。
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公开(公告)号：US09223158B2
公开(公告)日：2015-12-29
申请号：US14233709
申请日：2012-07-19
CPC分类号： G02F1/035 , G02B2006/1204 , G02B2006/1218 , G02F1/0123 , G02F2201/07 , G02F2202/06 , G02F2202/20 , G02F2203/21
摘要： An object of the present invention is to provide a manufacturing method of an optical waveguide element whose DC drift is suppressed, and to provide a manufacturing method of an optical waveguide element, capable of adjusting DC drift in the middle of manufacturing processes so as to improve a fabrication yield. The method of manufacturing an optical waveguide element comprises a step of forming an optical waveguide in a substrate having an electro-optic effect, a step of forming a buffer layer, and a step of forming an electrode, in which one stage or a plurality of stages of an interface diffusion layer heat adjustment step (S1, S2) for adjusting a concentration distribution of a specific substance in the buffer layer by heating is included after the buffer layer is formed.
摘要翻译： 本发明的目的是提供一种抑制了直流漂移的光波导元件的制造方法，提供能够在制造工序中间调整直流漂移的光波导元件的制造方法，从而提高 制造产量。 制造光波导元件的方法包括在具有电光效应的基板中形成光波导的步骤，形成缓冲层的步骤和形成电极的步骤，其中一个或多个 在缓冲层形成之后，包括用于通过加热来调节缓冲层中的特定物质的浓度分布的界面扩散层热调节步骤（S1，S2）的阶段。
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公开(公告)号：US20110243493A1
公开(公告)日：2011-10-06
申请号：US13065737
申请日：2011-03-29
IPC分类号： G02B6/10
CPC分类号： G02B6/126 , G02B2006/1204 , G02B2006/12061 , G02B2006/12097
摘要： The waveguide-type polarizer includes: a Z-cut lithium niobate substrate; an optical waveguide having a ridge structure and formed on the substrate; a low refractive index film formed with a thickness satisfying 0≦n·t/λ≦0.3742 (where n is a refractive index, t (μm) is the thickness of the film, and λ (μm) is the wavelength of a light wave) on the side of the ridge structure; and a high refractive index film formed with a thickness satisfying 0.089≦n·/λ on the low refractive index film. The width of the ridge structure is a ridge width where the distribution of ordinary light of the light waves propagated through the optical waveguide changes and the distribution of extraordinary light of the light waves does not change, the angle of the ridge structure is less than 90°, and the waveguide-type polarizer has a function of transmitting extraordinary light.
摘要翻译： 波导型偏振器包括：Z切割的铌酸锂基板; 具有脊结构并形成在所述基板上的光波导; 形成厚度满足0＆nlE的低折射率膜; n·t /λ＆nlE; 0.3742（其中n是折射率，t（μm）是膜的厚度，λ（μm）是光波长 ）在脊结构的一侧; 以及在低折射率膜上形成厚度满足0.089
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公开(公告)号：US08306372B2
公开(公告)日：2012-11-06
申请号：US13065737
申请日：2011-03-29
IPC分类号： G02B6/00
CPC分类号： G02B6/126 , G02B2006/1204 , G02B2006/12061 , G02B2006/12097
摘要： The waveguide-type polarizer includes: a Z-cut lithium niobate substrate; an optical waveguide having a ridge structure and formed on the substrate; a low refractive index film formed with a thickness satisfying 0≦n·t/λ≦0.3742 (where n is a refractive index, t (μm) is the thickness of the film, and λ (μm) is the wavelength of a light wave) on the side of the ridge structure; and a high refractive index film formed with a thickness satisfying 0.089≦n·/λ on the low refractive index film. The width of the ridge structure is a ridge width where the distribution of ordinary light of the light waves propagated through the optical waveguide changes and the distribution of extraordinary light of the light waves does not change, the angle of the ridge structure is less than 90°, and the waveguide-type polarizer has a function of transmitting extraordinary light.
摘要翻译： 波导型偏振器包括：Z切割的铌酸锂基板; 具有脊结构并形成在所述基板上的光波导; 形成厚度满足0＆nlE的低折射率膜; n·t /λ＆nlE; 0.3742（其中n是折射率，t（μm）是膜的厚度，λ（μm）是光波长 ）在脊结构的一侧; 以及在低折射率膜上形成厚度满足0.089
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