公开(公告)号：US20110299962A1

公开(公告)日：2011-12-08

申请号：US13209871

申请日：2011-08-15

申请人： Takeshi OONO ,  Kenji Nakata ,  Shoji Okiguchi ,  Tooru Ueno ,  Hidehiro Oomae ,  Shigeharu Minami ,  Yoshitaka Kai

发明人： Takeshi OONO ,  Kenji Nakata ,  Shoji Okiguchi ,  Tooru Ueno ,  Hidehiro Oomae ,  Shigeharu Minami ,  Yoshitaka Kai

IPC分类号： H01L21/677 ,  H01L21/673

CPC分类号： H01L21/67167 ,  H01L21/67745 ,  Y10S414/136

摘要： A vacuum processing apparatus includes vacuum processing chambers for subjecting a sample to vacuum processing, a vacuum carriage, a switchable chamber, a cassette support for supporting a plurality of cassettes capable of housing samples, and a waiting cassette support for supporting a waiting cassette that differs from the cassettes supported on the cassette support and capable of having a number of samples. An atmospheric carriage enables carrying a sample among a given cassette of the plurality of cassettes or the waiting cassette. A controller effects control for carrying unprocessed and processed samples among the given cassette, the waiting cassette and the vacuum processing chamber, so that a mixture of both processed and unprocessed samples does not exist in the given cassette or the waiting cassette.

摘要翻译： 真空处理设备包括用于对样品进行真空处理的真空处理室，真空托架，可切换室，用于支撑多个能够容纳样品的盒的盒支架和用于支撑不同的等待盒的等待盒支架 从支撑在盒支架上的盒子并且能够具有多个样品。 大气托架能够在多个盒子或等待盒中的给定盒中携带样品。 控制器执行控制以在给定的盒式磁带，等待盒和真空处理室之间携带未处理和处理的样品，使得处理的和未处理的样品的混合物不存在于给定的盒式磁带或等待盒中。