公开(公告)号：US20090003978A1

公开(公告)日：2009-01-01

申请号：US12230467

申请日：2008-08-29

申请人： Takeshi Oono ,  Kenji Nakata ,  Shoji Okiguchi ,  Tooru Ueno ,  Hidehiro Oomae ,  Shigeharu Minami ,  Yoshitaka Kai

发明人： Takeshi Oono ,  Kenji Nakata ,  Shoji Okiguchi ,  Tooru Ueno ,  Hidehiro Oomae ,  Shigeharu Minami ,  Yoshitaka Kai

IPC分类号： H01L21/67

CPC分类号： H01L21/67167 ,  H01L21/67745 ,  Y10S414/136

摘要： A vacuum processing apparatus and method in which the apparatus includes vacuum processing chambers for subjecting a sample to vacuum processing, a vacuum carriage, a switchable chamber, a cassette support for supporting a plurality of cassettes capable of housing samples, and a waiting cassette support for supporting a waiting cassette that differs from the cassettes supported on the cassette support and capable of having a number of samples. An atmospheric carriage enables carrying a sample among a given cassette of the plurality of cassettes or the waiting cassette. A controller effects control for carrying unprocessed and processed samples among the given cassette, the waiting cassette and the vacuum processing chamber, so that a mixture of both processed and unprocessed samples does not exist in the given cassette or the waiting cassette.

摘要翻译： 一种真空处理装置和方法，其中所述装置包括用于对样品进行真空处理的真空处理室，真空支架，可切换室，用于支撑多个能够容纳样品的盒的盒支架，以及用于 支持等同的盒子，其与支撑在盒支架上的盒子不同，并且能够具有多个样品。 大气托架能够在多个盒子或等待盒中的给定盒中携带样品。 控制器执行控制以在给定的盒式磁带，等待盒和真空处理室之间携带未处理和处理的样品，使得处理的和未处理的样品的混合物不存在于给定的盒式磁带或等待盒中。

公开(公告)号：US20110299962A1

公开(公告)日：2011-12-08

申请号：US13209871

申请日：2011-08-15

申请人： Takeshi OONO ,  Kenji Nakata ,  Shoji Okiguchi ,  Tooru Ueno ,  Hidehiro Oomae ,  Shigeharu Minami ,  Yoshitaka Kai

发明人： Takeshi OONO ,  Kenji Nakata ,  Shoji Okiguchi ,  Tooru Ueno ,  Hidehiro Oomae ,  Shigeharu Minami ,  Yoshitaka Kai

IPC分类号： H01L21/677 ,  H01L21/673

CPC分类号： H01L21/67167 ,  H01L21/67745 ,  Y10S414/136

摘要： A vacuum processing apparatus includes vacuum processing chambers for subjecting a sample to vacuum processing, a vacuum carriage, a switchable chamber, a cassette support for supporting a plurality of cassettes capable of housing samples, and a waiting cassette support for supporting a waiting cassette that differs from the cassettes supported on the cassette support and capable of having a number of samples. An atmospheric carriage enables carrying a sample among a given cassette of the plurality of cassettes or the waiting cassette. A controller effects control for carrying unprocessed and processed samples among the given cassette, the waiting cassette and the vacuum processing chamber, so that a mixture of both processed and unprocessed samples does not exist in the given cassette or the waiting cassette.

摘要翻译： 真空处理设备包括用于对样品进行真空处理的真空处理室，真空托架，可切换室，用于支撑多个能够容纳样品的盒的盒支架和用于支撑不同的等待盒的等待盒支架 从支撑在盒支架上的盒子并且能够具有多个样品。 大气托架能够在多个盒子或等待盒中的给定盒中携带样品。 控制器执行控制以在给定的盒式磁带，等待盒和真空处理室之间携带未处理和处理的样品，使得处理的和未处理的样品的混合物不存在于给定的盒式磁带或等待盒中。

公开(公告)号：US20050220575A1

公开(公告)日：2005-10-06

申请号：US10874241

申请日：2004-06-24

申请人： Takeshi Oono ,  Kenji Nakata ,  Shoji Okiguchi ,  Tooru Ueno ,  Hidehiro Oomae ,  Shigeharu Minami ,  Yoshitaka Kai

发明人： Takeshi Oono ,  Kenji Nakata ,  Shoji Okiguchi ,  Tooru Ueno ,  Hidehiro Oomae ,  Shigeharu Minami ,  Yoshitaka Kai

IPC分类号： H01L21/3065 ,  B65G1/00 ,  H01L21/00 ,  H01L21/677 ,  H01L21/68

CPC分类号： H01L21/67167 ,  H01L21/67745 ,  Y10S414/136

摘要： The invention provides a vacuum processing apparatus and vacuum processing method capable of improving the yield factor of a product. A vacuum processing apparatus 1 comprises a plurality of vacuum processing chambers 7 for providing vacuum processing to a sample 2, a vacuum carriage means 8 for carrying a sample into and out of the vacuum processing chamber 7, a switchable chamber 9 capable of being switched between atmosphere and vacuum for carrying a sample into and out of the vacuum processing chamber, a cassette supporting means 10 for supporting a plurality of cassettes housing samples, a carriage means 4 capable of moving vertically for taking out a sample from a given cassette on the cassette supporting means, and a control means performing carriage control for carrying the sample in the given cassette via the carriage means, the switchable chamber and the vacuum carriage means into the vacuum processing chamber and for carrying the processed sample out of the vacuum processing chamber, wherein the apparatus is further equipped with a waiting cassette supporting means for supporting a waiting cassette 5 capable of preventing the processed samples and the unprocessed samples from being mixed in a single cassette.

摘要翻译： 本发明提供能够提高产品的成品率的真空处理装置和真空处理方法。 真空处理装置1包括用于向样品2提供真空处理的多个真空处理室7，用于将样品进出真空处理室7的真空载置装置8，可切换室9 用于将样品携带到真空处理室中的气体和真空;用于支撑容纳样品的多个盒的盒支撑装置10;能够垂直移动的托架装置4，用于从盒上的给定盒带取出样品 支撑装置，以及执行托架控制的控制装置，用于将经由所述托架装置，所述可切换室和所述真空托架装置的所述样本运送到所述真空处理室中并将所述经处理的样品运送出所述真空处理室， 该装置还配备有用于支撑等待盒式磁带5插头的等待盒支持装置 防止处理的样品和未处理的样品在单个盒中混合。

公开(公告)号：US07862289B2

公开(公告)日：2011-01-04

申请号：US12230467

申请日：2008-08-29

申请人： Takeshi Oono ,  Kenji Nakata ,  Shoji Okiguchi ,  Tooru Ueno ,  Hidehiro Oomae ,  Shigeharu Minami ,  Yoshitaka Kai

发明人： Takeshi Oono ,  Kenji Nakata ,  Shoji Okiguchi ,  Tooru Ueno ,  Hidehiro Oomae ,  Shigeharu Minami ,  Yoshitaka Kai

IPC分类号： B65H85/00

CPC分类号： H01L21/67167 ,  H01L21/67745 ,  Y10S414/136

摘要： A vacuum processing apparatus and method in which the apparatus includes vacuum processing chambers for subjecting a sample to vacuum processing, a vacuum carriage, a switchable chamber, a cassette support for supporting a plurality of cassettes capable of housing samples, and a waiting cassette support for supporting a waiting cassette that differs from the cassettes supported on the cassette support and capable of having a number of samples. An atmospheric carriage enables carrying a sample among a given cassette of the plurality of cassettes or the waiting cassette. A controller effects control for carrying unprocessed and processed samples among the given cassette, the waiting cassette and the vacuum processing chamber, so that a mixture of both processed and unprocessed samples does not exist in the given cassette or the waiting cassette.

摘要翻译： 一种真空处理装置和方法，其中所述装置包括用于对样品进行真空处理的真空处理室，真空支架，可切换室，用于支撑多个能够容纳样品的盒的盒支架，以及用于 支持等同的盒子，其与支撑在盒支架上的盒子不同，并且能够具有多个样品。 大气托架能够在多个盒子或等待盒中的给定盒中携带样品。 控制器执行控制以在给定的盒式磁带，等待盒和真空处理室之间携带未处理和处理的样品，使得处理的和未处理的样品的混合物不存在于给定的盒式磁带或等待盒中。

公开(公告)号：US07476073B2

公开(公告)日：2009-01-13

申请号：US10874241

申请日：2004-06-24

申请人： Takeshi Oono ,  Kenji Nakata ,  Shoji Okiguchi ,  Tooru Ueno ,  Hidehiro Oomae ,  Shigeharu Minami ,  Yoshitaka Kai

发明人： Takeshi Oono ,  Kenji Nakata ,  Shoji Okiguchi ,  Tooru Ueno ,  Hidehiro Oomae ,  Shigeharu Minami ,  Yoshitaka Kai

IPC分类号： H01L21/02

CPC分类号： H01L21/67167 ,  H01L21/67745 ,  Y10S414/136

摘要： A vacuum processing apparatus and method includes at least one vacuum processing chamber, at least one carriage for carrying the sample from a given cassette into and out of the vacuum processing chamber. A controller performs carriage control for carrying the sample taken out of the given cassette into the vacuum processing chamber, and for carrying the processed sample out of the vacuum processing chamber. A waiting cassette support supports a waiting cassette in which an unprocessed sample from the given cassette or a processed sample from the given cassette after vacuum processing is placed so as to prevent the processed and unprocessed sample from being mixed with each other.

摘要翻译： 真空处理装置和方法包括至少一个真空处理室，至少一个托架，用于将来自给定盒的样品运送到真空处理室中。 控制器执行托架控制，以将从给定盒取出的样品运送到真空处理室中，并将处理过的样品运送出真空处理室。 等待的盒式支架支持等待盒，其中放置了来自给定盒的未处理样品或真空处理后的给定盒的处理样品，以防止处理和未处理的样品彼此混合。

公开(公告)号：US08033770B2

公开(公告)日：2011-10-11

申请号：US12230466

申请日：2008-08-29

申请人： Takeshi Oono ,  Kenji Nakata ,  Shoji Okiguchi ,  Tooru Ueno ,  Hidehiro Oomae ,  Shigeharu Minami ,  Yoshitaka Kai

发明人： Takeshi Oono ,  Kenji Nakata ,  Shoji Okiguchi ,  Tooru Ueno ,  Hidehiro Oomae ,  Shigeharu Minami ,  Yoshitaka Kai

IPC分类号： H01L21/677

CPC分类号： H01L21/67167 ,  H01L21/67745 ,  Y10S414/136

摘要： A vacuum processing apparatus includes vacuum processing chambers for subjecting a sample to vacuum processing, a vacuum carriage, a switchable chamber, a cassette support for supporting a plurality of cassettes capable of housing samples, and a waiting cassette support for supporting a waiting cassette that differs from the cassettes supported on the cassette support and capable of having a number of samples. An atmospheric carriage enables carrying a sample among a given cassette of the plurality of cassettes or the waiting cassette. A controller effects control for carrying unprocessed and processed samples among the given cassette, the waiting cassette and the vacuum processing chamber, so that a mixture of both processed and unprocessed samples does not exist in the given cassette or the waiting cassette.

摘要翻译： 真空处理设备包括用于对样品进行真空处理的真空处理室，真空托架，可切换室，用于支撑多个能够容纳样品的盒的盒支架和用于支撑不同的等待盒的等待盒支架 从支撑在盒支架上的盒子并且能够具有多个样品。 大气托架能够在多个盒子或等待盒中的给定盒中携带样品。 控制器执行控制以在给定的盒式磁带，等待盒和真空处理室之间携带未处理和处理的样品，使得处理的和未处理的样品的混合物不存在于给定的盒式磁带或等待盒中。

公开(公告)号：US20090010738A1

公开(公告)日：2009-01-08

申请号：US12230466

申请日：2008-08-29

申请人： Takeshi Oono ,  Kenji Nakata ,  Shoji Okiguchi ,  Tooru Ueno ,  Hidehiro Oomae ,  Shigeharu Minami ,  Yoshitaka Kai

发明人： Takeshi Oono ,  Kenji Nakata ,  Shoji Okiguchi ,  Tooru Ueno ,  Hidehiro Oomae ,  Shigeharu Minami ,  Yoshitaka Kai

IPC分类号： H01L21/02

CPC分类号： H01L21/67167 ,  H01L21/67745 ,  Y10S414/136

摘要： A vacuum processing apparatus includes vacuum processing chambers for subjecting a sample to vacuum processing, a vacuum carriage, a switchable chamber, a cassette support for supporting a plurality of cassettes capable of housing samples, and a waiting cassette support for supporting a waiting cassette that differs from the cassettes supported on the cassette support and capable of having a number of samples. An atmospheric carriage enables carrying a sample among a given cassette of the plurality of cassettes or the waiting cassette. A controller effects control for carrying unprocessed and processed samples among the given cassette, the waiting cassette and the vacuum processing chamber, so that a mixture of both processed and unprocessed samples does not exist in the given cassette or the waiting cassette.

摘要翻译： 真空处理设备包括用于对样品进行真空处理的真空处理室，真空托架，可切换室，用于支撑多个能够容纳样品的盒的盒支架和用于支撑不同的等待盒的等待盒支架 从支撑在盒支架上的盒子并且能够具有多个样品。 大气托架能够在多个盒子或等待盒中的给定盒中携带样品。 控制器执行控制以在给定的盒式磁带，等待盒和真空处理室之间携带未处理和处理的样品，使得处理的和未处理的样品的混合物不存在于给定的盒式磁带或等待盒中。

公开(公告)号：US06920369B2

公开(公告)日：2005-07-19

申请号：US10911659

申请日：2004-08-05

申请人： Tooru Ueno ,  Shigeru Nakamoto ,  Shoji Okiguchi ,  Hideki Yamasaki ,  Kouji Nishihata

发明人： Tooru Ueno ,  Shigeru Nakamoto ,  Shoji Okiguchi ,  Hideki Yamasaki ,  Kouji Nishihata

IPC分类号： G05B23/02 ,  B01J3/00 ,  H01L21/00 ,  H01L21/02 ,  H01L21/677 ,  G06F19/00

CPC分类号： H01L21/67276 ,  H01L21/67167 ,  H01L21/67745 ,  H01L21/67769

摘要： A method of operating vacuum processing equipment that includes multiple sets of apparatus for performing a succession of different processes on individual wafers, an apparatus for transporting said wafers, and an apparatus for controlling said processing apparatus sets and said transport apparatus, and has at least two sets of wafer processing routes including multiple sets of said processing apparatus; wherein it is possible to judge whether each set of said processing apparatus for performing various processes is in a valid or invalid status for operation, to electrically disconnect only the processing apparatus whose operational status has been judged to be invalid, to reconstruct said processing routes by using the processing apparatus whose operational status has been judged to be valid, and to process said wafers by using only said processing apparatus which is valid for operation.

摘要翻译： 一种操作真空处理设备的方法，其包括用于在单个晶片上执行不同处理的多组设备，用于传输所述晶片的设备以及用于控制所述处理设备组和所述传送设备的设备，并且具有至少两个 一组晶片处理路线，包括多组所述处理装置; 其中可以判断用于执行各种处理的所述处理装置的每一组是否处于用于操作的有效或无效状态，仅电连接仅操作状态被判断为无效的处理装置，以便重新构建所述处理路线 使用其操作状态已被判断为有效的处理装置，并且仅使用对于操作有效的所述处理装置来处理所述晶片。

公开(公告)号：US20050010320A1

公开(公告)日：2005-01-13

申请号：US10911659

申请日：2004-08-05

申请人： Tooru Ueno ,  Shigeru Nakamoto ,  Shoji Okiguchi ,  Hideki Yamasaki ,  Kouji Nishihata

发明人： Tooru Ueno ,  Shigeru Nakamoto ,  Shoji Okiguchi ,  Hideki Yamasaki ,  Kouji Nishihata

IPC分类号： G05B23/02 ,  B01J3/00 ,  H01L21/00 ,  H01L21/02 ,  H01L21/677 ,  G06F19/00

CPC分类号： H01L21/67276 ,  H01L21/67167 ,  H01L21/67745 ,  H01L21/67769

摘要： A method of operating vacuum processing equipment that includes multiple sets of apparatus for performing a succession of different processes on individual wafers, an apparatus for transporting said wafers, and an apparatus for controlling said processing apparatus sets and said transport apparatus, and has at least two sets of wafer processing routes including multiple sets of said processing apparatus; wherein it is possible to judge whether each set of said processing apparatus for performing various processes is in a valid or invalid status for operation, to electrically disconnect only the processing apparatus whose operational status has been judged to be invalid, to reconstruct said processing routes by using the processing apparatus whose operational status has been judged to be valid, and to process said wafers by using only said processing apparatus which is valid for operation.

公开(公告)号：US06795745B1

公开(公告)日：2004-09-21

申请号：US09666596

申请日：2000-09-20

申请人： Tooru Ueno ,  Shigeru Nakamoto ,  Shoji Okiguchi ,  Hideki Yamasaki ,  Kouji Nishihata

发明人： Tooru Ueno ,  Shigeru Nakamoto ,  Shoji Okiguchi ,  Hideki Yamasaki ,  Kouji Nishihata

IPC分类号： G06F1900

CPC分类号： H01L21/67276 ,  H01L21/67167 ,  H01L21/67745 ,  H01L21/67769

摘要： A method of operating vacuum processing equipment that includes multiple sets of apparatus for performing a succession of different processes on individual wafers, an apparatus for transporting said wafers, and an apparatus for controlling said processing apparatus sets and said transport apparatus, and has at least two sets of wafer processing routes including multiple sets of said processing apparatus; wherein it is possible to judge whether each set of said processing apparatus for performing various processes is in a valid or invalid status for operation, to electrically disconnect only the processing apparatus whose operational status has been judged to be invalid, to reconstruct said processing routes by using the processing apparatus whose operational status has been judged to be valid, and to process said wafers by using only said processing apparatus which is valid for operation.

摘要翻译： 一种操作真空处理设备的方法，其包括用于在单个晶片上执行不同处理的多组设备，用于传输所述晶片的设备以及用于控制所述处理设备组和所述传送设备的设备，并且具有至少两个 一组晶片处理路线，包括多组所述处理装置; 其中可以判断用于执行各种处理的所述处理装置的每一组是否处于用于操作的有效或无效状态，仅电连接仅操作状态被判断为无效的处理装置，以便重新构建所述处理路线 使用其操作状态已被判断为有效的处理装置，并且仅使用对于操作有效的所述处理装置来处理所述晶片。