摘要:
The present invention enables siloxanes which have a detrimental effect on the quality of products during semiconductor production to be efficiently removed from silicon compound gases, and enables minute amounts of siloxanes in these gases to be accurately measured to a few ppb, thus allowing for improvements in quality control by offering silicon compound gases of high purity. Diatomaceous earth M filled into a removal column 2 is heated by heating means provided on the removal column 2, while an inert gas such as nitrogen or helium is fed from an inert gas delivery pipe 13 via a pressure regulator 5 and an entry valve 6 into the removal-column 2, and is allowed to flow out through an outlet valve 8 in order to thermally activate the diatomaceous earth M. After activation, the removal column is cooled to a temperature of 60-0° C., at which temperature a silicon compound gas S such as silane is fed through the pressure regulator 5 and the entry valve 6 into the removal column 2 so as to come into contact with the activated diatomaceous earth M. As a result, high-purity silicon compound gas which has been purified by removing siloxanes is let out through a gas vent pipe 9, from which it can be delivered through the outlet valve 8 to an area of use.
摘要:
The present invention enables siloxanes which have a detrimental effect on the quality of products during semiconductor production to be efficiently removed from silicon compound gases, and enables minute amounts of siloxanes in these gases to be accurately measured to a few ppb, thus allowing for improvements in quality control by offering silicon compound gases of high purity. Diatomaceous earth M filled into a removal column 2 is heated by heating means provided on the removal column 2, while an inert gas such as nitrogen or helium is fed from an inert gas delivery pipe 13 via a pressure regulator 5 and an entry valve 6 into the removal column 2, and is allowed to flow out through an outlet valve 8 in order to thermally activate the diatomaceous earth M. After activation, the removal column is cooled to a temperature of 60-0.degree. C., at which temperature a silicon compound gas S such as silane is fed through the pressure regulator 5 and the entry valve 6 into the removal column 2 so as to come into contact with the activated diatomaceous earth M. As a result, high-purity silicon compound gas which has been purified by removing siloxanes is let out through a gas vent pipe 9, from which it can be delivered through the outlet valve 8 to an area of use.
摘要:
The present invention enables siloxanes which have a detrimental effect on the quality of products during semiconductor production to be efficiently removed from silicon compound gases, and enables minute amounts of siloxanes in these gases to be accurately measured to a few ppb, thus allowing for improvements in quality control by offering silicon compound gases of high purity. Diatomaceous earth M filled into a removal column 2 is heated by heating means provided on the removal column 2, while an inert gas such as nitrogen or helium is fed from an inert gas delivery pipe 13 via a pressure regulator 5 and an entry valve 6 into the removal column 2, and is allowed to flow out through an outlet valve 8 in order to thermally activate the diatomaceous earth M. After activation, the removal column is cooled to a temperature of 60-0.degree. C., at which temperature a silicon compound gas S such as silane is fed through the pressure regulator 5 and the entry valve 6 into the removal column 2 so as to come into contact with the activated diatomaceous earth M. As a result, high-purity silicon compound gas which has been purified by removing siloxanes is let out through a gas vent pipe 9, from which it can be delivered through the outlet valve 8 to an area of use.
摘要:
An agent for vertical orientation treatment consisting essentially of a polyimide which contains a linear alkyl group having at least 12 carbon atoms in an amount of at least 5% by weight of the alkyl group to the total weight of the polyimide, and which, when a coating film of the polyimide is formed on a substrate, has a surface energy of not more than 38 dyn/cm.
摘要:
The present invention relates to an alignment treating agent for a liquid crystal cell, which comprises an organic solvent-soluble polyimide resin comprising a tetracarboxylic acid and a diamine, at least 10 mol % of the diamine having a bivalent organic group selected from the group consisting of: ##STR1## The aligned film for a liquid crystal using the solvent-soluble polyimide resin of the present invention does not require a heat treatment at a high temperature at the time of forming a resin film and enables to use a substrate poor in heat-resistance, and alignment properties such as a tilt angle and a voltage maintenance of the aligned film are not deteriorated even after durability test at a high temperature.
摘要:
Butene-1 is polymerized in the presence of a catalytic system comprising a solid catalytic component (A), a trialkylaluminum compound (B), an organic acid ester (C), and an organoaluminum compound (D) at a molar ratio of (D) to (B) ranging 0.1 to 10 wherein said solid catalytic component (A) is obtained by reacting a reaction product (a) of a Grignard reagent with a chain or cyclic hydropolysiloxane having the unit ##EQU1## (R.sup.1 represents an alkyl, aryl, aralkyl, alkoxy or aryloxy group; a is 0, 1 or 2; b is 1, 2 or 3 and a+b.ltoreq.3) with at least one compound having the formulaR.sub.n.sup.2 M(.sup.(z) X.sub.z-n(R.sup.2 represents a C.sub.1 to C.sub.12 hydrocarbon moiety; M represents Al or Si; z represents atomic value of 3 or 4; X represents a halogen atom; n is 0, 1-(z-1) to obtain a reaction product (b) and further reacting said reaction product (b) with at least one titanium halide in the presence of an organic acid ester.
摘要:
An alignment treating agent for a liquid crystal cell, which comprises a polyimide resin of the formula (I): wherein R1 is a tetravalent organic group constituting a tetracarboxylic acid or its derivative, R2 is a bivalent organic group constituting a diamine, and m is a positive integer, provided that at least 10 mol % of R2 is a bivalent organic group selected from the group consisting of: wherein X is H, OH, an alkyl group, an alkoxy group, a carboxyl group, an acyl group or a halogen atom, said polyimide resin being made insoluble in an organic solvent by coating a precursor solution of said polyimide resin on a substrate, followed by heating.
摘要:
A ferroelectric liquid crystal element comprising a pair of substrates each having a transparent electrode and an orientation controlling film formed on the electrode, and ferroelectric liquid crystal sandwiched between the substrates in contact with the film, wherein said orientation controlling film is an organic polymer film treated by rubbing treatment and capable of giving nematic liquid crystal a pretilt angle of at least 10.degree. to the substrate surface.
摘要:
A liquid crystal aligning agent consisting essentially of a polyimide resin obtained by the polymerization of a diamine, a tetracarboxylic acid dianhydride and a monoamine of the formula:R.sup.2 (R.sup.1).sub.n NH.sub.2 (I)wherein R.sup.1 is a divalent organic group, R.sup.2 is an alkyl group having from 6 to 20 carbon atoms, and n is 0 or 1.
摘要:
This invention is concerned with a composition to be used as an agent for aligning liquid crystals in a liquid crystal cell, wherein liquid crystal molecules are aligned with an increased pretilt angle with respect to the substrate, such composition consists essentially of a polyimide resin precursor having repeating units represented by the formula (I) ##STR1## wherein R.sub.1 denotes an organic group constituting a tetracarboxylic acid or its derivative; and R.sub.2 represents a divalent organic group constituting a diamine; anda precursor of a diimide compound represented by the formula (II) or (III): ##STR2## wherein R.sub.3 denotes a divalent organic group constituting a diamine; each of R.sub.4 and R.sub.5 represents an organic groups constituting a dicarboxylic acid containing an alkyl group having 6 to 20 carbon atoms, or its derivative, ##STR3## wherein R.sub.6 denotes an organic group constituting a tetracarboxylic acid or its derivative, and each of R.sub.7 and R.sub.8 represents an organic group constituting a monoamine containing an alkyl group having 6 to 20 carbon atoms.