Method of removing siloxanes from silicon compound gases and apparatus therefor, and siloxane content analyzing method and analyzing apparatus
    1.
    发明授权
    Method of removing siloxanes from silicon compound gases and apparatus therefor, and siloxane content analyzing method and analyzing apparatus 有权
    从硅化合物气体中除去硅氧烷的方法及其设备,以及硅氧烷含量分析方法和分析装置

    公开(公告)号:US06196050B1

    公开(公告)日:2001-03-06

    申请号:US09217992

    申请日:1998-12-22

    IPC分类号: G01N1910

    摘要: The present invention enables siloxanes which have a detrimental effect on the quality of products during semiconductor production to be efficiently removed from silicon compound gases, and enables minute amounts of siloxanes in these gases to be accurately measured to a few ppb, thus allowing for improvements in quality control by offering silicon compound gases of high purity. Diatomaceous earth M filled into a removal column 2 is heated by heating means provided on the removal column 2, while an inert gas such as nitrogen or helium is fed from an inert gas delivery pipe 13 via a pressure regulator 5 and an entry valve 6 into the removal-column 2, and is allowed to flow out through an outlet valve 8 in order to thermally activate the diatomaceous earth M. After activation, the removal column is cooled to a temperature of 60-0° C., at which temperature a silicon compound gas S such as silane is fed through the pressure regulator 5 and the entry valve 6 into the removal column 2 so as to come into contact with the activated diatomaceous earth M. As a result, high-purity silicon compound gas which has been purified by removing siloxanes is let out through a gas vent pipe 9, from which it can be delivered through the outlet valve 8 to an area of use.

    摘要翻译: 本发明使得可以有效地从硅化合物气体中除去在半导体生产过程中对产品质量产生不利影响的硅氧烷,并且能够将这些气体中的微量硅氧烷精确地测量到几ppb,从而允许改进 提供高纯度硅复合气体的质量控制。 填充到除去塔2中的硅藻土M由设置在除去塔2上的加热装置加热,同时惰性气体例如氮气或氦气通过压力调节器5和入口阀6从惰性气体输送管13供入到 去除塔2,并且允许其通过出口阀8流出,以热活化硅藻土M.活化后,将除去塔冷却至60℃的温度,在此温度下 诸如硅烷的硅化合物气体S通过压力调节器5和进入阀6进入去除塔2中以与活化的硅藻土M接触。结果,已经将高纯度硅化合物气体 通过除去硅氧烷净化出来,通过排气管9排出,通过出口阀8将其从输送阀8输送到使用区域。

    Apparatus for analyzing a silicon compound gas for siloxane content
    2.
    发明授权
    Apparatus for analyzing a silicon compound gas for siloxane content 失效
    硅化合物气体分析硅氧烷含量的装置

    公开(公告)号:US5952557A

    公开(公告)日:1999-09-14

    申请号:US115541

    申请日:1998-07-15

    摘要: The present invention enables siloxanes which have a detrimental effect on the quality of products during semiconductor production to be efficiently removed from silicon compound gases, and enables minute amounts of siloxanes in these gases to be accurately measured to a few ppb, thus allowing for improvements in quality control by offering silicon compound gases of high purity. Diatomaceous earth M filled into a removal column 2 is heated by heating means provided on the removal column 2, while an inert gas such as nitrogen or helium is fed from an inert gas delivery pipe 13 via a pressure regulator 5 and an entry valve 6 into the removal column 2, and is allowed to flow out through an outlet valve 8 in order to thermally activate the diatomaceous earth M. After activation, the removal column is cooled to a temperature of 60-0.degree. C., at which temperature a silicon compound gas S such as silane is fed through the pressure regulator 5 and the entry valve 6 into the removal column 2 so as to come into contact with the activated diatomaceous earth M. As a result, high-purity silicon compound gas which has been purified by removing siloxanes is let out through a gas vent pipe 9, from which it can be delivered through the outlet valve 8 to an area of use.

    摘要翻译: 本发明使得可以有效地从硅化合物气体中除去在半导体生产过程中对产品质量产生不利影响的硅氧烷,并且能够将这些气体中的微量硅氧烷精确地测量到几ppb,从而允许改进 提供高纯度硅复合气体的质量控制。 填充到除去塔2中的硅藻土M由设置在除去塔2上的加热装置加热,同时惰性气体例如氮气或氦气通过压力调节器5和入口阀6从惰性气体输送管13供入到 除去塔2,并且允许其通过出口阀8流出,以热活化硅藻土M.在活化后,将除去塔冷却至60℃的温度,在该温度下将硅 诸如硅烷的复合气体S通过压力调节器5和入口阀6进入去除塔2,以便与活化的硅藻土M接触。结果,已经纯化的高纯度硅化合物气体 通过除去硅氧烷通过排气管9排出,从该出口阀9将其通过出口阀8输送到使用区域。

    Method of removing siloxanes from silicon compound gases and apparatus
therefor
    3.
    发明授权
    Method of removing siloxanes from silicon compound gases and apparatus therefor 失效
    从硅化合物气体中除去硅氧烷的方法及其设备

    公开(公告)号:US5900532A

    公开(公告)日:1999-05-04

    申请号:US15780

    申请日:1998-01-29

    摘要: The present invention enables siloxanes which have a detrimental effect on the quality of products during semiconductor production to be efficiently removed from silicon compound gases, and enables minute amounts of siloxanes in these gases to be accurately measured to a few ppb, thus allowing for improvements in quality control by offering silicon compound gases of high purity. Diatomaceous earth M filled into a removal column 2 is heated by heating means provided on the removal column 2, while an inert gas such as nitrogen or helium is fed from an inert gas delivery pipe 13 via a pressure regulator 5 and an entry valve 6 into the removal column 2, and is allowed to flow out through an outlet valve 8 in order to thermally activate the diatomaceous earth M. After activation, the removal column is cooled to a temperature of 60-0.degree. C., at which temperature a silicon compound gas S such as silane is fed through the pressure regulator 5 and the entry valve 6 into the removal column 2 so as to come into contact with the activated diatomaceous earth M. As a result, high-purity silicon compound gas which has been purified by removing siloxanes is let out through a gas vent pipe 9, from which it can be delivered through the outlet valve 8 to an area of use.

    摘要翻译: 本发明使得可以有效地从硅化合物气体中除去在半导体生产过程中对产品质量产生不利影响的硅氧烷,并且能够将这些气体中的微量硅氧烷精确地测量到几ppb,从而允许改进 提供高纯度硅复合气体的质量控制。 填充到除去塔2中的硅藻土M由设置在除去塔2上的加热装置加热,同时惰性气体例如氮气或氦气通过压力调节器5和入口阀6从惰性气体输送管13供入到 除去塔2,并且允许其通过出口阀8流出,以热活化硅藻土M.在活化后,将除去塔冷却至60℃的温度,在该温度下将硅 诸如硅烷的复合气体S通过压力调节器5和入口阀6进入去除塔2,以便与活化的硅藻土M接触。结果,已经纯化的高纯度硅化合物气体 通过除去硅氧烷通过排气管9排出,从该出口阀9将其通过出口阀8输送到使用区域。

    Agent for vertical orientation treatment
    4.
    发明授权
    Agent for vertical orientation treatment 失效
    垂直定向处理代理

    公开(公告)号:US5420233A

    公开(公告)日:1995-05-30

    申请号:US76646

    申请日:1993-06-15

    IPC分类号: C08G73/10 G02F1/1337

    摘要: An agent for vertical orientation treatment consisting essentially of a polyimide which contains a linear alkyl group having at least 12 carbon atoms in an amount of at least 5% by weight of the alkyl group to the total weight of the polyimide, and which, when a coating film of the polyimide is formed on a substrate, has a surface energy of not more than 38 dyn/cm.

    摘要翻译: 一种用于垂直取向处理的试剂,其基本上由聚酰亚胺组成,该聚酰亚胺含有至少具有至少12个碳原子的直链烷基,其量相对于聚酰亚胺的总重量为烷基的至少5重量%,并且当 在基板上形成聚酰亚胺的涂膜,其表面能为38dyn / cm以下。

    Alignment treating agent for liquid crystal cell
    5.
    发明授权
    Alignment treating agent for liquid crystal cell 失效
    液晶单元对准处理剂

    公开(公告)号:US5350539A

    公开(公告)日:1994-09-27

    申请号:US925670

    申请日:1992-08-07

    CPC分类号: C08G73/1067 G02F1/133723

    摘要: The present invention relates to an alignment treating agent for a liquid crystal cell, which comprises an organic solvent-soluble polyimide resin comprising a tetracarboxylic acid and a diamine, at least 10 mol % of the diamine having a bivalent organic group selected from the group consisting of: ##STR1## The aligned film for a liquid crystal using the solvent-soluble polyimide resin of the present invention does not require a heat treatment at a high temperature at the time of forming a resin film and enables to use a substrate poor in heat-resistance, and alignment properties such as a tilt angle and a voltage maintenance of the aligned film are not deteriorated even after durability test at a high temperature.

    摘要翻译: 本发明涉及一种液晶元件的取向处理剂,其包含含有四羧酸和二胺的有机溶剂可溶性聚酰亚胺树脂,至少10摩尔%的具有选自二价有机基团的二胺 :使用本发明的溶剂可溶性聚酰亚胺树脂的液晶膜在形成树脂膜时不需要在高温下的热处理,并且能够使用耐热性差的基板和对准 即使在高温下进行耐久性试验之后,取向膜的倾斜角度和电压维持等性能也不会劣化。

    Process for producing polybutene-1
    6.
    发明授权
    Process for producing polybutene-1 失效
    生产聚丁烯-1的方法

    公开(公告)号:US4398006A

    公开(公告)日:1983-08-09

    申请号:US279803

    申请日:1981-07-02

    CPC分类号: C08F10/00

    摘要: Butene-1 is polymerized in the presence of a catalytic system comprising a solid catalytic component (A), a trialkylaluminum compound (B), an organic acid ester (C), and an organoaluminum compound (D) at a molar ratio of (D) to (B) ranging 0.1 to 10 wherein said solid catalytic component (A) is obtained by reacting a reaction product (a) of a Grignard reagent with a chain or cyclic hydropolysiloxane having the unit ##EQU1## (R.sup.1 represents an alkyl, aryl, aralkyl, alkoxy or aryloxy group; a is 0, 1 or 2; b is 1, 2 or 3 and a+b.ltoreq.3) with at least one compound having the formulaR.sub.n.sup.2 M(.sup.(z) X.sub.z-n(R.sup.2 represents a C.sub.1 to C.sub.12 hydrocarbon moiety; M represents Al or Si; z represents atomic value of 3 or 4; X represents a halogen atom; n is 0, 1-(z-1) to obtain a reaction product (b) and further reacting said reaction product (b) with at least one titanium halide in the presence of an organic acid ester.

    摘要翻译: 丁烯-1在包含固体催化组分(A),三烷基铝化合物(B),有机酸酯(C)和有机铝化合物(D))的催化体系存在下以(D )至(B)的范围为0.1至10,其中所述固体催化组分(A)通过使格利雅试剂的反应产物(a)与具有单元的链或环状氢聚硅氧烷(R1表示烷基,芳基 芳基,芳烷基,烷氧基或芳氧基; a为0,1或2; b为1,2或3并且a + b = 3)与至少一种具有式Rn2M((z)Xz-n 表示C1〜C12烃部分; M表示Al或Si; z表示原子值3或4; X表示卤素原子; n表示0,1-(z-1),得到反应产物(b) 在有机酸酯的存在下使所述反应产物(b)与至少一种卤化钛反应。

    Alignment treating agent for liquid crystal cell
    7.
    发明授权
    Alignment treating agent for liquid crystal cell 失效
    液晶单元对准处理剂

    公开(公告)号:US06441127B1

    公开(公告)日:2002-08-27

    申请号:US08183332

    申请日:1994-01-19

    IPC分类号: C08G7310

    摘要: An alignment treating agent for a liquid crystal cell, which comprises a polyimide resin of the formula (I): wherein R1 is a tetravalent organic group constituting a tetracarboxylic acid or its derivative, R2 is a bivalent organic group constituting a diamine, and m is a positive integer, provided that at least 10 mol % of R2 is a bivalent organic group selected from the group consisting of: wherein X is H, OH, an alkyl group, an alkoxy group, a carboxyl group, an acyl group or a halogen atom, said polyimide resin being made insoluble in an organic solvent by coating a precursor solution of said polyimide resin on a substrate, followed by heating.

    摘要翻译: 液晶单元取向处理剂,其包含式(I)的聚酰亚胺树脂:其中R1为构成四羧酸或其衍生物的四价有机基团,R 2为构成二胺的二价有机基团,m为 其中X为H,OH,烷基,烷氧基,羧基,酰基或卤素时,R2为至少10mol%的二价有机基团。 原子,所述聚酰亚胺树脂通过将所述聚酰亚胺树脂的前体溶液涂布在基材上,然后加热而使其不溶于有机溶剂。

    Composition for liquid crystal aligning agent
    10.
    发明授权
    Composition for liquid crystal aligning agent 失效
    液晶取向剂组成

    公开(公告)号:US4929658A

    公开(公告)日:1990-05-29

    申请号:US334571

    申请日:1989-04-07

    IPC分类号: C08G73/10 G02F1/1337

    摘要: This invention is concerned with a composition to be used as an agent for aligning liquid crystals in a liquid crystal cell, wherein liquid crystal molecules are aligned with an increased pretilt angle with respect to the substrate, such composition consists essentially of a polyimide resin precursor having repeating units represented by the formula (I) ##STR1## wherein R.sub.1 denotes an organic group constituting a tetracarboxylic acid or its derivative; and R.sub.2 represents a divalent organic group constituting a diamine; anda precursor of a diimide compound represented by the formula (II) or (III): ##STR2## wherein R.sub.3 denotes a divalent organic group constituting a diamine; each of R.sub.4 and R.sub.5 represents an organic groups constituting a dicarboxylic acid containing an alkyl group having 6 to 20 carbon atoms, or its derivative, ##STR3## wherein R.sub.6 denotes an organic group constituting a tetracarboxylic acid or its derivative, and each of R.sub.7 and R.sub.8 represents an organic group constituting a monoamine containing an alkyl group having 6 to 20 carbon atoms.