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公开(公告)号:US20070158401A1
公开(公告)日:2007-07-12
申请号:US10576922
申请日:2004-10-15
IPC分类号: G06F17/00
CPC分类号: G03F7/70725 , G03F7/70716 , G05B2219/49193
摘要: A stage device has guide members (2, 3) for guiding each of two moving bodies (4, 5) in one axis direction on a level block (1) and has a beam (6) laid across the two moving bodies (4, 5) so as to be perpendicular to the guide members (2, 3) and moving together with the moving bodies (4, 5). The two moving bodies (4, 5) are individually moved to rotate the beam (6) relative to a yaw rotation axis perpendicular to the one axis direction.
摘要翻译: 舞台装置具有用于将两个移动体(4,5)中的每一个沿一个轴线方向引导到水平块(1)上的导向构件(2,3),并且具有横跨两个移动体(4)的横梁(6) 5),以便垂直于引导构件(2,3)并与移动体(4,5)一起移动。 两个移动体(4,5)被单独地移动以使梁(6)相对于垂直于一个轴方向的偏转旋转轴旋转。
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公开(公告)号:US07743998B2
公开(公告)日:2010-06-29
申请号:US10576922
申请日:2004-10-15
IPC分类号: G06K7/00
CPC分类号: G03F7/70725 , G03F7/70716 , G05B2219/49193
摘要: A stage device has guide members (2, 3) for guiding each of two moving bodies (4, 5) in one axis direction on a level block (1) and has a beam (6) laid across the two moving bodies (4, 5) so as to be perpendicular to the guide members (2, 3) and moving together with the moving bodies (4, 5). The two moving bodies (4, 5) are individually moved to rotate the beam (6) relative to a yaw rotation axis perpendicular to the one axis direction.
摘要翻译: 舞台装置具有用于将两个移动体(4,5)中的每一个沿一个轴线方向引导到水平块(1)上的导向构件(2,3),并且具有横跨两个移动体(4)的横梁(6) 5),以便垂直于引导构件(2,3)并与移动体(4,5)一起移动。 两个移动体(4,5)被单独地移动以使梁(6)相对于垂直于一个轴方向的偏转旋转轴旋转。
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3.
公开(公告)号:US06629471B2
公开(公告)日:2003-10-07
申请号:US10020889
申请日:2001-12-19
申请人: Kazuharu Uchimi
发明人: Kazuharu Uchimi
IPC分类号: G05G1100
CPC分类号: F16C32/06 , F16C29/025 , G03F7/70716 , G03F7/70816 , Y10T74/20354 , Y10T74/20378
摘要: A first slider moves along a guide rail extending in a Y-axis direction and includes a beam extending in an X-axis direction, a T-shaped section, and an arm member. The T-shaped section moves along the guide rail at an end of the beam. The arm member extends in the Y-axis direction at the other end of the beam. A second slider moves in the X-axis direction along the beam. The first slider is supported on the base by static pressure air bearing pads disposed at two positions on the lower surface of the T-shaped section, at at least one position on the lower surface of the beam at the central portion thereof and at the two positions on the lower surface of the arm member. The second slider is supported on the base by static pressure air bearing pads disposed at three positions on the lower surface thereof.
摘要翻译: 第一滑块沿着沿Y轴方向延伸的导轨移动并且包括沿X轴方向延伸的梁,T形截面和臂构件。 T形部分在梁的端部沿着导轨移动。 臂构件在梁的另一端沿Y轴方向延伸。 第二滑块沿着光束在X轴方向上移动。 第一滑块通过设置在T形部分的下表面上的两个位置处的静压空气轴承瓦片支撑在基座上,在梁的中部的梁的下表面上的至少一个位置处, 位于臂构件的下表面上。 第二滑块通过设置在其下表面上的三个位置处的静压空气轴承瓦座支撑在基座上。
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