公开(公告)号：US20160004169A1

公开(公告)日：2016-01-07

申请号：US14854933

申请日：2015-09-15

Applicant: NIKON CORPORATION

Inventor： Yuichi SHIBAZAKI

IPC: G03F7/20

CPC classification number: G03F7/70866 ,  G03F7/70133 ,  G03F7/707 ,  G03F7/70716 ,  G03F7/70725 ,  G03F7/70758 ,  G03F7/70775 ,  G03F7/70858 ,  G03F7/70933 ,  G03F7/70941 ,  Y10T74/20354

Abstract: One pair each of a Y linear motor (a total of four) on the +X side and the −X side that drive a reticle stage include one pair each of a stator section (a total of four) and three each of a mover section (a total of six) on the +X side and the −X side. In this case, the three each of the mover sections on the +X side and the −X side configure one each of a mover. The mover section located in the center in the Z-axis direction of each of the movers is used in common by each pair of the Y linear motors. Therefore, the weight of the mover section (reticle stage) of the reticle stage device is reduced, which allows a higher acceleration. Further, the mover section located in the center in the Z-axis direction of each of the movers coincides with a neutral plane of the reticle stage.

Abstract translation: + X侧的Y直线电动机（共4个）和驱动标线器平台的-X侧分别具有一个定子部（共4个）和3个各自的动子部 （共六个）在+ X侧和-X侧。 在这种情况下，+ X侧和-X侧的三个动子部分中的每一个配置一个动子。 位于每个移动体的Z轴方向中心的动子部分由每对Y线性电动机共同使用。 因此，分划板台装置的移动部（标线片台）的重量减小，这允许更高的加速度。 此外，位于每个移动体的Z轴方向中心的动子部分与标线片台的中性平面重合。

公开(公告)号：US20130068050A1

公开(公告)日：2013-03-21

申请号：US13612972

申请日：2012-09-13

Applicant: Hisayoshi SAKAI

Inventor： Hisayoshi SAKAI

IPC: F16H21/50

CPC classification number: B23Q17/2428 ,  B23Q1/25 ,  B23Q17/2495 ,  F16C29/025 ,  F16C2322/39 ,  Y10T74/18568 ,  Y10T74/20354

Abstract: The invention includes: a base; a table supported by the base; a tubular rod connected to a side of the table via a joint; a drive mechanism that moves the rod forward and backward; and a laser interferometer that detects displacement of the table relative to the base. The joint is provided by a supplying-discharging static-pressure joint and includes: a movement surface that is connected to the table and is orthogonal to a moving direction of the table; a drive surface that is connected to the rod and faces the movement surface; and a fluid supply channel supplying fluid to a static-pressure clearance between the movement surface and the drive surface. The laser interferometer includes a laser path having an optical axis along the moving direction passing through the inside of the rod of which a pressure is reduced and the drive surface and reflect on the movement surface.

Abstract translation: 本发明包括：基座; 由基地支持的表; 管状杆，通过接头连接到工作台的一侧; 一个向前和向后移动杆的驱动机构; 以及激光干涉仪，其检测台相对于基座的位移。 接头由供给排放静压接头提供，包括：移动表面，其连接到工作台并且与工作台的移动方向正交; 驱动表面，其连接到所述杆并且面向所述运动表面; 以及将流体供应到运动表面和驱动表面之间的静压间隙的流体供应通道。 激光干涉仪包括具有沿着移动方向的光轴的激光路径，该激光路径通过其压力减小的杆的内部并且驱动表面并且在运动表面上反射。

公开(公告)号：US08282398B2

公开(公告)日：2012-10-09

申请号：US12799767

申请日：2010-04-30

Applicant: Horst Knoedgen

Inventor： Horst Knoedgen

IPC: H01R41/00

CPC classification number: H01R41/00 ,  Y10T74/20354

Abstract: Systems and methods are disclosed for x-y tables wherein rolling elements of rolling-element bearings are transferring electrical energy between a fixed part of the x-y table and a movable part of the x-y table. The electrical energy transferred could be power to electrical devices as well as signals to and from devices on the movable part of the x-y table. Electrically conducting rolling elements are moving on electrically conducting grooves on the fixed and movable part of the x-y table. Conductor tracks on the fixed and movable part are connected to the grooves and to devices on the movable platform. In a preferred embodiment of the invention the x-y table is part of a camera wherein linear motors, preferably with integrated position sensing, are moving the x-y table back to a home position in case of a dislocation due to a mechanical shock. The invention allows an exact and fast positioning of an x-y table without requiring a flexible cable. The rolling-element bearings could be ball bearings, roller bearings, needle bearings, or other kind of bearings having electrically conductive rolling elements.

Abstract translation: 公开了用于x-y表的系统和方法，其中滚动元件轴承的滚动元件在x-y台的固定部分和x-y台的可移动部分之间传递电能。 传输的电能可以是电气设备的电力，以及来自x-​​y台的可移动部分上的设备的信号。 导电滚动元件在x-y台的固定和可移动部分上的导电沟槽上移动。 固定和可移动部分上的导体轨道连接到凹槽和可移动平台上的装置。 在本发明的优选实施例中，x-y工作台是相机的一部分，其中优选地具有集成位置感测的线性电动机在由于机械冲击而发生位错的情况下将x-y工作台移回到原始位置。 本发明允许x-y表的精确和快速的定位，而不需要柔性电缆。 滚动体轴承可以是具有导电滚动元件的滚珠轴承，滚子轴承，滚针轴承或其它类型的轴承。

公开(公告)号：US20110317145A1

公开(公告)日：2011-12-29

申请号：US13227180

申请日：2011-09-07

Applicant: Osamu Yasunobe

Inventor： Osamu Yasunobe

IPC: G03B27/58

CPC classification number: G03F7/70758 ,  F16C29/025 ,  F16C32/0603 ,  G03F7/70816 ,  G03F7/7095 ,  Y10T74/20354

Abstract: A guide includes a brittle material layer and a magnetically attracting magnetic body, e.g., a metal layer. A recess and a projection are formed on the metal layer. The brittle material layer is made of, e.g., a sprayed ceramic material and covers the recess formed on the magnetically attracting metal layer. A movable body moves as it levitates above the surface of the brittle material layer.

Abstract translation: 引导件包括脆性材料层和磁吸引磁体，例如金属层。 在金属层上形成凹部和突出部。 脆性材料层由例如喷涂陶瓷材料制成并且覆盖形成在吸磁金属层上的凹部。 当可移动体悬浮在脆性材料层的表面上方时移动。

公开(公告)号：US07886629B2

公开(公告)日：2011-02-15

申请号：US10332262

申请日：2001-06-23

Applicant: Franco Sartorio

Inventor： Franco Sartorio

IPC: G05G11/00 ,  B23Q1/62

CPC classification number: B23Q1/012 ,  B23Q1/445 ,  B25J9/1615 ,  G05B19/39 ,  G05B2219/40289 ,  G05B2219/40293 ,  G05B2219/41457 ,  G05B2219/42225 ,  G05B2219/49284 ,  Y10T74/20354

Abstract: A machine tool comprises a first travelling assembly (10) which carries in its turn a second travelling assembly (22). The first assembly (10) is adapted to position the second assembly (22) in a relatively wide space (S1) and with movements at relatively low speeds and accelerations. The second assembly (22) carries in its turn a tool which is provided with actuators for positioning the tool in a relatively narrow space (S2) and with movements at relatively high speeds and accelerations. The machine includes means for controlling the movements of the two assemblies (10, 22) which are so arranged to obtain s global movement of the tool without solutions of continuity in all the space of movement (S1) of the first assembly (10). The invention also relates to a manipulator device which can be used independently or be installed as a second assembly (22) on a travelling structure of a machine tool.

Abstract translation: 一种机床包括第一行进组件（10），该第一行进组件依次承载第二行进组件（22）。 第一组件（10）适于将第二组件（22）定位在相对宽的空间（S1）中并且以相对较低的速度和加速度的运动。 第二组件（22）又带有一个工具，该工具设置有用于将工具定位在相对狭窄的空间（S2）中并具有相对较高速度和加速度的运动的致动器。 机器包括用于控制两个组件（10,22）的运动的装置，其被布置成获得工具的全局运动，而没有在第一组件（10）的所有运动空间（S1）中具有连续性的解决方案。 本发明还涉及一种可以独立使用或作为第二组件（22）安装在机床的行进结构上的机械手装置。

公开(公告)号：US07624661B2

公开(公告)日：2009-12-01

申请号：US10558686

申请日：2004-06-25

Applicant: Shigehiro Umetsu ,  Tatsuro Shimoyama ,  Koji Uchida

Inventor： Shigehiro Umetsu ,  Tatsuro Shimoyama ,  Koji Uchida

IPC: G05G11/00

CPC classification number: G03F7/70816 ,  B23Q1/38 ,  B23Q1/545 ,  F16C29/02 ,  F16C2322/39 ,  G12B5/00 ,  Y10T74/20341 ,  Y10T74/20348 ,  Y10T74/20354

Abstract: A supporting unit in a moving table device, easily connected to a base and a table, is provided. A supporting unit (Uα) has a pair of planar bearing plates. Inside the planar bearing plates are positioned spherical bearing plates, respectively. Further, a spherical axial member is sandwiched between the spherical bearing plates (34a, 34b). A planar bearing is formed between each of the planar bearing plates and each of the spherical bearing plates. A spherical bearing is formed between each of the spherical bearing plates and the spherical axial member. Thus, the supporting unit (Uα) is provided with a certain degree of movability in five-axis directions. With the high degree of movability, the supporting unit (Uα) can be easily connected to a base and a table.

Abstract translation: 提供了一种移动台装置中的支撑单元，其容易地连接到基座和工作台。 支撑单元（Ualpha）具有一对平面支承板。 平面轴承板内分别定位有球面轴承板。 此外，球面轴向构件夹在球面轴承板（34a，34b）之间。 在每个平面支承板和每个球面轴承板之间形成平面轴承。 在每个球面轴承板和球形轴向构件之间形成球面轴承。 因此，支撑单元（Ualpha）在五轴方向上具有一定程度的可移动性。 具有高度的可移动性，支撑单元（Ualpha）可以方便地连接到底座和桌子上。

公开(公告)号：US07393175B2

公开(公告)日：2008-07-01

申请号：US10852501

申请日：2004-05-24

Applicant: Andrei-B. Petrin

Inventor： Andrei-B. Petrin

IPC: B25J11/00

CPC classification number: H01L41/0953 ,  B65G27/24 ,  H01L41/0946 ,  H02N2/028 ,  Y10T74/20354

Abstract: An actuator system for making a nanoscale movement of an object is provided. In the actuator system, a platform supports the object. A Z-axis actuator connects the platform to the object in a Z-axis direction, and moves the object in the Z-axis direction by Z-axis direction transformation. A frame supports the platform around the platform. An X-axis actuator connects the frame to the platform in an X-axis or Y-axis direction perpendicular to the Z-axis, and moves the object in the X-axis direction by transformation in the direction perpendicular to the Z-axis.

Abstract translation: 提供了用于进行物体的纳米级移动的致动器系统。 在执行器系统中，平台支撑物体。 Z轴致动器将平台与Z轴方向的物体连接起来，通过Z轴方向的变换使Z轴方向移动。 一个框架支持平台周围的平台。 X轴致动器在与Z轴垂直的X轴或Y轴方向上将框架连接到平台，并且通过沿与Z轴垂直的方向进行变换来使物体在X轴方向上移动。

公开(公告)号：US07334304B2

公开(公告)日：2008-02-26

申请号：US11508573

申请日：2006-08-23

Applicant: Walter Grossmann

Inventor： Walter Grossmann

IPC: B23P23/00

CPC classification number: B23Q1/5462 ,  Y10S414/13 ,  Y10T29/5114 ,  Y10T29/5153 ,  Y10T74/20305 ,  Y10T74/20341 ,  Y10T74/20354 ,  Y10T74/2036 ,  Y10T82/2506 ,  Y10T409/307672 ,  Y10T409/309576

Abstract: In order to improve a machine tool for machining a workpiece by a relative movement between the workpiece and a tool, comprising a first receiving device for the workpiece or the tool, a compound slide system with a second receiving device for the tool or the workpiece and comprising a drive device for moving the second receiving device in relation to the first receiving device, which drive device acts at at least two spaced-apart points of application by at least three drive struts extending parallel to at least two different directions and each with a pivot joint, and with which drive device the at least two points of application can be positioned by means of the at least three drive struts, in such a way that exact positioning of the second slide element can be achieved by structural measures, it is proposed that four drive struts of invariant length, each with a pivot joint, act on the slide element, each of which struts is pivotally connected to a guiding slide, which is guided in a linearly movable manner transversely in relation to the longitudinal direction of the respective drive struts, and a maximum of two of which drive struts run parallel to one another.

Abstract translation: 为了改进用于通过工件和工具之间的相对运动来加工工件的机床，包括用于工件或工具的第一接收装置，具有用于工具或工件的第二接收装置的复合滑动系统，以及 包括用于相对于第一接收装置移动第二接收装置的驱动装置，该驱动装置通过至少三个平行于至少两个不同方向延伸的驱动支柱在至少两个间隔开的应用点处作用，并且每个具有一个 枢转接头，并且通过该至少两个施加点可以通过至少三个驱动支柱来定位至少两个施加点，这样可以通过结构措施实现第二滑动元件的精确定位。 每个具有枢转关节的四个不变长度的驱动支柱作用在滑动元件上，每个支撑件可枢转地连接到引导滑块，引导滑块 相对于相应的驱动支柱的纵向横向地线性移动的方式，并且最多两个驱动支柱彼此平行地延伸。

公开(公告)号：US07282874B2

公开(公告)日：2007-10-16

申请号：US11342040

申请日：2006-01-27

Applicant: Yugo Shibata ,  Atsushi Kimura

Inventor： Yugo Shibata ,  Atsushi Kimura

IPC: H02P5/00

CPC classification number: H02K41/03 ,  H02K2201/18 ,  Y10T74/20354 ,  Y10T74/20378

Abstract: An alignment apparatus which moves a object comprises a first structure having a holding member which holds the object, a second structure having a magnet which constitutes a linear motor, the linear motor drives the first and second structure, and a flow passage formed between the holding member and the magnet.

Abstract translation: 移动物体的对准装置包括具有保持物体的保持构件的第一结构，具有构成线性电动机的磁体的第二结构，线性电动机驱动第一和第二结构，以及形成在保持 会员和磁铁。

公开(公告)号：US20070182262A1

公开(公告)日：2007-08-09

申请号：US11351738

申请日：2006-02-09

Applicant: Neldon Johnson

Inventor： Neldon Johnson

IPC: F16D27/00 ,  H02K7/06

CPC classification number: H02K49/106 ,  B60Y2400/608 ,  F16H9/24 ,  H02K7/1016 ,  H02K7/14 ,  H02K49/06 ,  H02K49/102 ,  Y10T74/20354 ,  Y10T464/30

Abstract: A magnetic transmission having an input shaft and an output shaft with two or more gear assemblies, each gear assembly having an input sprocket affixed to the input shaft, an output armature with peripheral electromagnets affixed to the output shaft, a transfer drum concentric with the output armature and having electromagnets inset from the inside surface of the transfer drum and a drum sprocket on the periphery of the transfer drum, and a transfer chain engaging the input sprocket and the drum sprocket. A gear assembly actuator is used to select and energize a desired gear assembly. A hysteresis clutch can also be used in lieu of the output armature and the transfer drum.

Abstract translation: 一种具有输入轴和具有两个或更多个齿轮组件的输出轴的磁性变速器，每个齿轮组件具有固定到输入轴的输入链轮，具有固定到输出轴上的外围电磁体的输出电枢，与输出轴同心的转印鼓 电枢并且具有从转鼓的内表面插入的电磁体和在转鼓的周边上的鼓链轮，以及接合输入链轮和鼓轮链轮的输送链。 齿轮组件致动器用于选择并激励所需的齿轮组件。 也可以使用磁滞离合器代替输出电枢和转印鼓。