公开(公告)号：US20140069232A1

公开(公告)日：2014-03-13

申请号：US13935589

申请日：2013-07-05

Applicant: Technion Research and Development Foundation Ltd.

Inventor： David ELATA ,  Arnon HIRSHBERG

IPC: F16H21/44

CPC classification number: F16H21/44 ,  B81B3/0062 ,  B81B2201/038 ,  B81B2203/0118 ,  Y10T74/18888

Abstract: A mechanism and method for motion conversion is disclosed. This mechanism can be easily fabricated using standard bulk micromachining technology. Based on this method with appropriate design, a horizontal, in-plane motion can be converted to a vertical or angular displacement out-of-plane. This design has great advantages in micro devices, which are built from a single layer, i.e. wafer fabrication, where an in-plane force is easy to implement, such as by the use of comb drive mechanisms, but an out-of-plane motion may be hard to achieve. The mechanism comprises a pair of beams of different heights, rigidly connected together at a number of points along their length, such that application of an in-plane force to the double beam structure results in out-of-plane motion of the double beam structure at points distant from the point of application of the force.

Abstract translation: 公开了一种用于运动转换的机构和方法。 这种机制可以使用标准的体积微加工技术轻松制造。 基于这种适当设计的方法，可以将水平的平面内运动转换为平面外的垂直或角位移。 这种设计在微器件中具有巨大的优势，微器件由单层构成，即晶片制造，其中易于实现平面内的力，例如通过使用梳齿驱动机构，但是平面外运动 可能很难实现。 该机构包括一对不同高度的梁，沿着它们的长度在多个点处刚性地连接在一起，使得对双梁结构施加平面内的力导致双梁结构的平面外运动 在远离施加力的点处。