摘要:
Apparatuses, systems, and methods associated with placement of magnets within a microelectromechanical system device are disclosed herein. In embodiments, a method of affixing at least one magnet in a microelectromechanical system, may include affixing an electromagnetic actuator to a base structure of the microelectromechanical system, the affixing including affixing the electromagnetic actuator within a recess formed in the base structure. The method may further include placing a magnet within the recess, wherein the recess includes at least a portion of a spring, the spring affixed to the base structure and extending into the recess, the placing including placing the magnet on a side of the electromagnetic actuator, between the spring and the side of the electromagnetic actuator, the spring pressing the magnet against the side of the electromagnetic actuator and maintaining a position of the magnet in response to the placing the magnet within the recess.
摘要:
A compliant micro device transfer head and head array are disclosed. In an embodiment a micro device transfer head includes a spring portion that is deflectable into a space between a base substrate and the spring portion.
摘要:
According to the present invention there is provided an actuator comprising, a movable member, the movable member comprising a support frame which is configured such that it can oscillate about a first oscillation axis and a mirror which is fixed to the support frame such that oscillation of the support frame will effect oscillation of the mirror; an coil, which cooperates with the support frame; one or more boundary portions provided between the support frame and the mirror which reduce the influence of warp transmitted from an edge of the support frame to the mirror, as the support frame oscillates about the first oscillation axis; wherein the support frame further comprises one or more cut-out regions, wherein the one or more cut-out regions are configured to be parallel to at least a portion of the coil, to reduce stress on the coil as the support frame oscillates about the first oscillation axis and/or to reduce the temperature dependence of the properties of the actuator.
摘要:
A compliant micro device transfer head and head array are disclosed. In an embodiment a micro device transfer head includes a spring portion that is deflectable into a space between a base substrate and the spring portion.
摘要:
An electrostatic actuator having a stationary electrode and a fixedly cantilevered bender is described, wherein the bender includes a cantilever electrode disposed opposite to the stationary electrode in an overlapping area and being deflectable in the direction of the stationary electrode.
摘要:
A micro-electromechanical device and method of manufacture are disclosed. A sacrificial layer is formed on a silicon substrate. A metal layer is formed on a top surface of the sacrificial layer. Soft magnetic material is electrolessly deposited on the metal layer to manufacture the micro-electromechanical device. The sacrificial layer is removed to produce a metal beam separated from the silicon substrate by a space.
摘要:
This disclosure provides systems, methods and apparatus for shutter-based EMS light modulators controlled by electrode actuators that include complementary sets of corrugations or teeth along the opposing beams of the actuators. The complementary sets of corrugations substantially engage one another when drawn together via an actuation voltage. By applying the actuation voltage across the opposing beams of such an actuator, the beams are drawn together both by the electromotive force resulting from the electric field acting between the portions of the beams that are substantially perpendicular to the direction of actuation of the actuator, and by fringing fields between the sides of the corrugations, which are substantially parallel to the direction of actuation. The additional fringing fields provide for increased electromotive force for a given input voltage.
摘要:
A micro-electromechanical device and method of manufacture are disclosed. A sacrificial layer is formed on a silicon substrate. A metal layer is formed on a top surface of the sacrificial layer. Soft magnetic material is electrolessly deposited on the metal layer to manufacture the micro-electromechanical device. The sacrificial layer is removed to produce a metal beam separated from the silicon substrate by a space.
摘要:
Provided is a method of fabricating magnetic cilia including the following steps. Step (A): A mold is provided in which a plurality of micro-channels are formed, wherein the aperture of each of the micro-channels is between 50 μm and 350 μm, and the depth of each of the micro-channels is between 500 μm and 3,500 μm. Step (B): A raw material is spread onto the mold and filled into each of the micro-channels, wherein the raw material includes a polymer and magnetic particles dispersed therein. Step (C): A heat treatment is performed to harden the raw material in each of the micro-channels into a magnetic cilium. Step (D): A mold release process is performed to isolate each of the magnetic cilia from each of the micro-channels.
摘要:
A motion conversion system is described. The motion conversion system comprises a first torsional member operative for rotating in a first direction. A second torsional member is offset a distance from the first torsional member, wherein the second torsional member is operative for rotating in a direction opposite from the first direction. And, a lateral member has a lower surface connected to the first and second torsional members. Wherein, translational movement of the lateral member results from rotational movement of the first and second torsional members.