公开(公告)号：US08422193B2

公开(公告)日：2013-04-16

申请号：US11641334

申请日：2006-12-19

申请人： Teng Chao D. Tao ,  William D. Lee ,  Marvin R. LaFontaine ,  Ashwin M. Purohit

发明人： Teng Chao D. Tao ,  William D. Lee ,  Marvin R. LaFontaine ,  Ashwin M. Purohit

IPC分类号： H01L21/683

CPC分类号： H01L21/6833

摘要： An electrostatic clamp (ESC), system, and method for clamping a workpiece is provided. A clamping plate of the ESC has central disk and an annulus encircling the central disk, wherein the central disk is recessed from the annulus by a gap distance, therein defining a volume. Backside gas delivery apertures are positioned proximate to an interface between the annulus and the central disk. A first voltage to a first electrode of the annulus clamps a peripheral region of the workpiece to a first layer. A second voltage to a second electrode of the central disk generally compensates for a pressure of a backside gas within the volume. The ESC can be formed of J-R- or Coulombic-type materials. A cooling plate associated with the clamping plate further provides cooling by one or more cooling channels configured to route a cooling fluid therethrough.

摘要翻译： 提供了用于夹紧工件的静电夹（ESC），系统和方法。 ESC的夹紧板具有中心盘和围绕中心盘的环形空间，其中中心盘从环形空间中间隙距离定义一个体积。 背侧气体输送孔位于环形区域与中央盘之间的界面附近。 环到第一电极的第一电压将工件的周边区域夹紧到第一层。 中心盘的第二电极的第二电压通常补偿体积内的背侧气体的压力。 ESC可由J-R-或库仑型材料形成。 与夹紧板相关联的冷却板还通过一个或多个冷却通道提供冷却，所述冷却通道被配置成使冷却流体从其中引导。

公开(公告)号：US20080144251A1

公开(公告)日：2008-06-19

申请号：US11641334

申请日：2006-12-19

申请人： Teng Chao D. Tao ,  William D. Lee ,  Marvin R. LaFontaine ,  Ashwin M. Purohit

发明人： Teng Chao D. Tao ,  William D. Lee ,  Marvin R. LaFontaine ,  Ashwin M. Purohit

IPC分类号： H01L21/687 ,  H01T23/00

CPC分类号： H01L21/6833

摘要： An electrostatic clamp (ESC), system, and method for clamping a workpiece is provided. A clamping plate of the ESC has central disk and an annulus encircling the central disk, wherein the central disk is recessed from the annulus by a gap distance, therein defining a volume. Backside gas delivery apertures are positioned proximate to an interface between the annulus and the central disk. A first voltage to a first electrode of the annulus clamps a peripheral region of the workpiece to a first layer. A second voltage to a second electrode of the central disk generally compensates for a pressure of a backside gas within the volume. The ESC can be formed of J-R- or Coulombic-type materials. A cooling plate associated with the clamping plate further provides cooling by one or more cooling channels configured to route a cooling fluid therethrough.

摘要翻译： 提供了用于夹紧工件的静电夹（ESC），系统和方法。 ESC的夹紧板具有中心盘和围绕中心盘的环形空间，其中中心盘从环形空间中间隙距离定义一个体积。 背侧气体输送孔位于环形区域与中央盘之间的界面附近。 环形物的第一电极的第一电压将工件的周边区域夹持到第一层。 中心盘的第二电极的第二电压通常补偿体积内的背侧气体的压力。 ESC可由J-R-或库仑型材料形成。 与夹紧板相关联的冷却板还通过一个或多个冷却通道提供冷却，所述冷却通道被配置成使冷却流体从其中引导。