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公开(公告)号：US4979826A
公开(公告)日：1990-12-25
申请号：US380038
申请日：1989-07-14
IPC分类号： G01D5/38
CPC分类号： G01D5/38
摘要： A displacement measuring apparatus has an illuminating device for illuminating a diffraction grating with a radiation beam, an optical system for directing first and second diffracted beams created by the diffraction grating with to the diffraction grating, the optical system being provided so that the first and second diffracted beams have a common optical path and travel in opposite directions along the optical path. In addition, a device receives an interference beam formed by first and second re-diffracted beams created by the first and second diffracted beams being diffracted by the diffraction grating, and outputs a signal conforming to the displacement of the diffraction grating relative to the radiation beam.
摘要翻译： 位移测量装置具有用于用辐射束照射衍射光栅的照明装置，用于将由衍射光栅产生的第一和第二衍射光束引导到衍射光栅的光学系统，所述光学系统被设置成使得第一和第二 衍射光束具有公共光路并沿着光路在相反方向上行进。 此外，设备接收由由衍射光栅衍射的第一和第二衍射光束产生的第一和第二重衍射光束形成的干涉光束，并且输出符合衍射光栅相对于辐射束的位移的信号 。
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2.发明授权
公开(公告)号：US4975570A
公开(公告)日：1990-12-04
申请号：US494860
申请日：1990-03-14
CPC分类号： G01D5/38
摘要： A rotary encoder for detecting a rotation status of a rotary scale having a diffraction grating formed along a rotational direction comprises a directing device for directing a radiation beam to a first position on the rotary scale and directing a plurality of diffracted beams generated at the first position to a second position different from the first position. The direction device is constructed such that the plurality of diffracted beams gave a common light path between the first position and the second position. The encoder also includes a forming device for forming an interference beam from a plurality of rediffracted beams generated at the second position, and a convertor for converting the interference beam to a signal to produce the signal representing the rotation status.
摘要翻译： 一种旋转编码器，用于检测具有沿着旋转方向形成的衍射光栅的旋转刻度的旋转状态，包括用于将辐射束引导到旋转刻度上的第一位置并引导在第一位置处产生的多个衍射光束的引导装置 到与第一位置不同的第二位置。 方向装置被构造成使得多个衍射光束在第一位置和第二位置之间给出公共光路。 编码器还包括用于从在第二位置处产生的多个重衍红光束形成干涉光束的成形装置，以及用于将干涉光束转换成信号以产生表示旋转状态的信号的转换器。
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公开(公告)号：US4970388A
公开(公告)日：1990-11-13
申请号：US410509
申请日：1989-09-21
IPC分类号： G01D5/38
CPC分类号： G01D5/38
摘要： An encoder for measuring the displacement of a movable diffraction grating has means for applying a radiation beam to the diffraction grating, a reflecting optical system for causing first and second reflected and diffracted beams created on the diffraction grating by the application of the radiation beam to be reflected and diffracted at least twice by the diffraction grating, and means for receiving an interference beam formed by the first and second reflected and diffracted beams reflected and diffracted at least twice and converting it into a signal conforming to the displacement of the diffraction grating.
摘要翻译： 用于测量可移动衍射光栅的位移的编码器具有将辐射束施加到衍射光栅的装置，用于通过施加辐射束使在衍射光栅上产生的第一和第二反射和衍射光束的反射光学系统的反射光学系统 由衍射光栅反射和衍射至少两次，以及用于接收由反射和衍射的第一和第二反射和衍射光束形成的干涉光束至少两次并将其转换成符合衍射光栅位移的信号的装置。
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公开(公告)号：US5066130A
公开(公告)日：1991-11-19
申请号：US347397
申请日：1989-05-04
IPC分类号： G01D5/38
CPC分类号： G01D5/38
摘要： A displacement measuring apparatus comprises a scale relatively displaced to an irradiating beam, a reading head to read the scale by the irradiating beam, and control device to control the apparatus for avoiding substantially the leakage of the irradiating beam out of the apparatus in response to the positional error of the scale and the irradiating beam.
摘要翻译： 位移测量装置包括与照射光束相对位移的标尺，用于通过照射光束读取标尺的读取头以及控制装置，用于控制装置，以便基本上避免照射光束从设备中泄漏出来，以响应于 刻度和照射光束的位置误差。
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公开(公告)号：US5000542A
公开(公告)日：1991-03-19
申请号：US346701
申请日：1989-05-03
IPC分类号： G01D5/38
CPC分类号： G01D5/38
摘要： In an optical type encoder for projecting a light beam onto an optical type scale having a diffraction grating formed thereon, forming an interferenced light by the use of a diffracted light from the scale, and photoelectrically converting the interferenced light to thereby measure the displacement of the scale, first and second light beams are caused to enter substantially the same position on the scale from different first and second directions, first and second diffracted light beams emerging from the scale by the first and second light beams being diffracted by the scale are directed to the aforementioned position by a reflecting device, the diffracted light beams emerging in the first and second directions by the first and second diffracted light beams being diffracted by the scale are superposed one upon the other to thereby form an interferenced light, and light components created by the first and second light beams being regularly reflected at the aforementioned position are not included in the interferenced light.
摘要翻译： 在用于将光束投射到其上形成有衍射光栅的光学刻度尺的光学型编码器中，通过使用来自刻度的衍射光形成介入光，并对该干涉光进行光电转换，从而测量 使第一和第二光束在不同的第一和第二方向上在刻度上进入基本上相同的位置，第一和第二光束通过刻度被衍射的第一和第二衍射光束被引导到 通过反射装置的上述位置，由第一和第二方向由第一和第二衍射光束以标尺衍射的第一和第二方向的衍射光束彼此重叠，从而形成介入光，并且由 在上述位置规则地反射的第一和第二光束为No t包含在干涉光中。
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公开(公告)号：US5038032A
公开(公告)日：1991-08-06
申请号：US488733
申请日：1990-02-26
IPC分类号： G01D5/38
CPC分类号： G01D5/38
摘要： An encoder in which a light beam emitted from a semiconductor laser or the like is applied to a diffraction grating from a predetermined direction which is not contained in a reference plane defined by direction of relative movement of the diffraction grating and a direction normal to the diffraction grating. A diffracted light created from the diffraction grating by the application of the light beam by the light applying means is reflected by re-entering means and the reflected light is caused to re-enter the diffraction grating at substantially the same position as the position at which the diffracted light is created. At this time, an interference light formed by the other re-diffracted lights than O-order light created from the diffraction grating substantially in the same direction as the predetermined direction by the re-entrance of the diffracted light by the re-entering means is detected, and the information of the relative displacement of the light beam and the diffraction grating is obtained from a variation in the intensity of the interference light.
摘要翻译： 一种编码器，其中从半导体激光器等发射的光束从预定方向施加到衍射光栅，该预定方向不包含在由衍射光栅的相对运动方向和垂直于衍射的方向限定的参考平面中 光栅。 由衍射光栅通过施加光束施加光束而产生的衍射光被重新进入的装置反射，并且使反射光重新进入到与其位置基本相同的位置处的衍射光栅 产生衍射光。 此时，由通过重新进入装置重新进入衍射光而与衍射光栅基本上沿与预定方向相同的方向产生的O级光而形成的其他再衍射光形成的干涉光是 并且根据干涉光的强度的变化获得光束和衍射光栅的相对位移的信息。
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公开(公告)号：US5017777A
公开(公告)日：1991-05-21
申请号：US437672
申请日：1989-11-17
IPC分类号： G01D5/38
CPC分类号： G01D5/38
摘要： A method for detecting a state of rotation of a rotary scale having a diffraction grating therein in which a radiation beam is directed to a first place on the diffraction grating to generate first and second diffracted beams. The first and second diffracted beams are re-diffracted at the first place to form a first re-diffracted beam and a second re-diffracted beam. The first and second re-diffracted beams are directed to a second place on the diffraction grating substantially opposite the first place with respect to the center of rotation of the rotary scale. The first and second re-diffracted beams are diffracted at the second place to interfere with each other so that an interference beam is formed. The interference beam is converted into a signal to detect the state of rotation of the rotary scale.
摘要翻译： 一种用于检测其中具有衍射光栅的旋转刻度的旋转状态的方法，其中辐射束被引导到衍射光栅上的第一位以产生第一和第二衍射光束。 第一和第二衍射光束在第一位置被再衍射以形成第一重衍射光束和第二重衍射光束。 第一和第二重衍射光束相对于旋转刻度盘的旋转中心基本上相对于第一位置被引导到衍射光栅上的第二位置。 第一和第二重衍射光束在第二位置被衍射以彼此干涉，从而形成干涉光束。 干涉光束被转换为信号以检测旋转刻度盘的旋转状态。
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公开(公告)号：US4998798A
公开(公告)日：1991-03-12
申请号：US346886
申请日：1989-05-03
CPC分类号： G01D5/38
摘要： An encoder having a long length measuring stroke with a simple construction is provided. The encoder comprises a scale formed with a periodic lattice pattern, first and second reading heads arranged along a moving direction of the scale for reading the scale, and an adder for adding output signals from the first and second reading heads. The encoder further has adjusting mechanism for adjusting such that the phase difference between the output signals from the first and second reading head becomes zero. A continuous periodic signal can be always accurately obtained independently of the position of the scale.
摘要翻译： 提供具有简单结构的具有长长度测量行程的编码器。 编码器包括形成有周期性格子图案的刻度，沿着刻度尺的移动方向布置的用于读取刻度的第一和第二读取头以及用于相加来自第一和第二读取头的输出信号的加法器。 编码器还具有用于调节的调整机构，使得来自第一和第二读取头的输出信号之间的相位差成为零。 可以始终准确地获得连续的周期信号，而不依赖于刻度尺的位置。
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公开(公告)号：US5021649A
公开(公告)日：1991-06-04
申请号：US496259
申请日：1990-03-20
IPC分类号： G01D5/38
CPC分类号： G01D5/38
摘要： An encoder of this invention radiates a light beam onto an optical scale, in which a reflection film is formed on a surface of a relief type diffraction grating formed on one surface of a light-transmission substrate, from a surface opposite to the formation surface of the diffraction grating, and detects a change in intensity of interference light caused by diffracted light produced by the diffraction grating, thereby measuring a displacement of the optical scale.
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10.发明授权Method and apparatus for detecting a reference position of a rotating scale with two sensors 失效用两个传感器检测旋转刻度尺的参考位置的方法和装置
公开(公告)号：US5026985A
公开(公告)日：1991-06-25
申请号：US409796
申请日：1989-09-20
IPC分类号： G01D5/36
CPC分类号： G01D5/36
摘要： In the reference-position detection method and apparatus for detecting a reference position of a scale, first and second patterns are disposed on the scale so that respective detection timings shift inversely to each other in response to a deviation in attitude of the scale. The first and second patterns are detected with timings different from each other by corresponding first and second sensors, and the reference position of the scale is determined according to outputs of respective sensors. Hence, even if the attitude of the scale changes from a predetermined attitude due to an inclination of the scale or a deviation in position of the scale, it is possible to exactly detect the reference position of the scale. Accordingly, it becomes also possible to increase the performance of a displacement measuring apparatus.
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