公开(公告)号：US20230134722A1

公开(公告)日：2023-05-04

申请号：US17513523

申请日：2021-10-28

Applicant: Texas Instruments Incorporated

Inventor： Yanbo He ,  Bichoy Bahr ,  Swaminathan Sankaran

IPC: G01F1/66

Abstract: An ultrasonic fluid flow measurement system includes an ultrasonic transducer having a semiconductor substrate and an interconnect region over the semiconductor substrate. The ultrasonic transducer has two arrays of ferroelectric resonators in the interconnect region. The arrays of ferroelectric resonators are parallel to a fluid boundary surface of a fluid flow channel attached to the ultrasonic transducer. The ultrasonic transducer includes a transmitter circuit and a detector circuit coupled to the arrays of ferroelectric resonators. The transmitter circuit and the detector circuit include active components in the semiconductor substrate. The ultrasonic fluid flow measurement system may be configured to measure speeds of particles in fluids in the fluid flow channel. The ultrasonic fluid flow measurement system may also be used to measure flow speeds of a fluid in the fluid flow channel.