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1.发明申请公开(公告)号：US20150168239A1
公开(公告)日：2015-06-18
申请号：US14537096
申请日：2014-11-10
CPC分类号： G02B21/04 , G01Q30/025 , G01Q60/366
摘要： Methods and apparatus for characterizing a sample in situ as to both its mechanical and optical characteristics. The apparatus comprises a reflective microscope with a concave primary mirror and a convex secondary mirror sharing a common optical axis, and an actuator vignetted by the convex secondary mirror for applying a force to a nanoprobe in a direction having a component along the common optical axis. The apparatus may addition include a source for generating an illuminating beam, a detector, and a processor for forming an image based on a signal provided by the detector.
摘要翻译： 用于将样品原位表征其机械和光学特性的方法和装置。 该装置包括具有凹面主镜和共享共同光轴的凸面次级反射镜的反射显微镜，以及由凸面辅镜反射的致动器，用于沿具有沿共同光轴的分量的方向向纳米探针施加力。 该装置还可以包括用于产生照明光束的源，检测器和用于基于由检测器提供的信号形成图像的处理器。
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2.发明授权公开(公告)号：US09588327B2
公开(公告)日：2017-03-07
申请号：US14537096
申请日：2014-11-10
CPC分类号： G02B21/04 , G01Q30/025 , G01Q60/366
摘要： Methods and apparatus for characterizing a sample in situ as to both its mechanical and optical characteristics. The apparatus comprises a reflective microscope with a concave primary mirror and a convex secondary mirror sharing a common optical axis, and an actuator vignetted by the convex secondary mirror for applying a force to a nanoprobe in a direction having a component along the common optical axis. The apparatus may addition include a source for generating an illuminating beam, a detector, and a processor for forming an image based on a signal provided by the detector.
摘要翻译： 用于将样品原位表征其机械和光学特性的方法和装置。 该装置包括具有凹面主镜和共享共同光轴的凸面次级反射镜的反射显微镜，以及由凸面辅镜反射的致动器，用于沿具有沿共同光轴的分量的方向向纳米探针施加力。 该装置还可以包括用于产生照明光束的源，检测器和用于基于由检测器提供的信号形成图像的处理器。
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