-
公开(公告)号:US20210193871A1
公开(公告)日:2021-06-24
申请号:US16757920
申请日:2018-10-31
Applicant: The Regents of the University of California
Inventor: Matthew S. Wong , David Hwang , Abdullah Alhassan , Steven P. DenBaars
Abstract: A reduction in leakage current and an increase in efficiency of III-nitride LEDs is obtained by sidewall passivation using atomic layer deposition of a dielectric. Atomic layer deposition is a hydrogen-free deposition method, which avoids problems associated with the effects of hydrogen on passivation and transparency.