公开(公告)号：US09859079B2

公开(公告)日：2018-01-02

申请号：US14910523

申请日：2014-08-06

Applicant: The Regents of the University of Michigan

Inventor： Mona Jarrahi ,  Mehmet Unlu ,  Christopher W. Berry ,  Shenglin Li

IPC: H01H1/20 ,  H01P1/12 ,  H01H51/27 ,  G02B6/293 ,  H01H49/00 ,  H01H50/00 ,  H01H51/32 ,  H01H57/00 ,  H01H59/00

CPC classification number: H01H51/27 ,  G02B6/29361 ,  G02B6/29395 ,  H01H49/00 ,  H01H50/005 ,  H01H51/32 ,  H01H57/00 ,  H01H59/0009 ,  H01H2057/006 ,  H01H2201/024

Abstract: A reconfigurable device for terahertz (THz) or infrared (IR) ranges that includes a base substrate, a lower array attached to the base substrate, and an upper array attached to the base substrate and at least partially suspended over the lower array. Activation of the reconfigurable device causes the upper array to mechanically flex towards the lower array so that electrical contact is made therebetween. Methods of fabricating and operating the reconfigurable device are also provided.