Systems and methods for detecting alignment errors
    2.
    发明授权
    Systems and methods for detecting alignment errors 有权
    用于检测对准误差的系统和方法

    公开(公告)号:US09098903B2

    公开(公告)日:2015-08-04

    申请号:US12840860

    申请日:2010-07-21

    IPC分类号: G06T7/00 H04N1/50

    CPC分类号: G06T7/0024 G06T7/30 H04N1/506

    摘要: A method of detecting an alignment error includes the steps of controlling a first portion of one or more imaging units to image on a substrate a first plurality of substantially parallel lines extending along a first direction and a second plurality of substantially parallel lines extending along a second direction and controlling a second portion of one or more imaging units to image a third plurality of substantially parallel lines extending along the first direction and a fourth plurality of substantially parallel lines extending along the second direction. One or more distances between adjacent lines of the second plurality of lines are varied and one or more distances between adjacent lines of the fourth plurality of lines are varied. Further, the lines imaged by the first and second portions form an alignment pattern. The method further includes the steps of collecting data relating to the alignment pattern and analyzing the collected data to determine an alignment error between the first and second portions of the one or more imaging units.

    摘要翻译: 检测对准误差的方法包括以下步骤:控制一个或多个成像单元的第一部分以在基板上成像沿着第一方向延伸的第一多个基本上平行的线,以及沿第二方向延伸的第二多个基本平行的线 并且控制一个或多个成像单元的第二部分以对沿着第一方向延伸的第三多个基本上平行的线进行成像,以及沿第二方向延伸的第四多个基本上平行的线。 第二组多行的相邻行之间的一个或多个距离是变化的,并且第四组多行的相邻行之间的一个或多个距离是变化的。 此外,由第一和第二部分成像的线形成对准图案。 该方法还包括以下步骤:收集与对准图案有关的数据并分析收集的数据以确定一个或多个成像单元的第一和第二部分之间的对准误差。