公开(公告)号：US20180174809A1

公开(公告)日：2018-06-21

申请号：US15837188

申请日：2017-12-11

Applicant: Thermo Fisher Scientific (Bremen) GmbH

Inventor： Thorben SCHUETHE

IPC: H01J49/00

CPC classification number: H01J49/0031 ,  F15B13/00 ,  G01F1/00 ,  G01F25/0053 ,  G05D7/00 ,  G05D7/03 ,  H01J49/005 ,  H01J49/105 ,  H01J49/24

Abstract: The present invention relates to a gas inlet system for an analytical apparatus. The gas inlet system comprises switchable flow restrictions for regulating gas flow rate. The invention also provides a system for calibrating gas flow rate in gas inlet systems, the system comprising a calibration line that comprises a gas flow meter, and that is arranged downstream of gas flow controllers in the gas inlet system. Methods of adjusting gas flow rates and methods of calibrating gas flow rates are also provided.