公开(公告)号：US06487792B2

公开(公告)日：2002-12-03

申请号：US09850888

申请日：2001-05-07

申请人： Thomas R. Sutton ,  Robert Koch

发明人： Thomas R. Sutton ,  Robert Koch

IPC分类号： F26B508

CPC分类号： H01L21/68792

摘要： An apparatus for agitating a workpiece in a high pressure environment comprises a workpiece holder, a bearing, a pressure chamber housing, and a nozzle. The workpiece holder couples to the pressure chamber housing via the bearing. The nozzle couples to the pressure chamber housing. The workpiece holder comprises protrusions and a region for holding the workpiece. In operation a fluid exits the nozzle and impinges the protrusions of the workpiece holder causing the workpiece holder to rotate, which agitates the workpiece.

摘要翻译： 用于在高压环境中搅拌工件的装置包括工件保持件，轴承，压力室壳体和喷嘴。 工件支架通过轴承与压力室壳体相连。 喷嘴连接到压力室壳体。 工件保持器包括突起和用于保持工件的区域。 在操作中，流体离开喷嘴并撞击工件保持器的突起，导致工件保持器旋转，这搅动了工件。

公开(公告)号：US06722642B1

公开(公告)日：2004-04-20

申请号：US10289830

申请日：2002-11-06

申请人： Thomas R. Sutton ,  Maximilan A. Biberger

发明人： Thomas R. Sutton ,  Maximilan A. Biberger

IPC分类号： B25B1100

CPC分类号： H01L21/68742 ,  B25B11/005 ,  H01L21/6838

摘要： A vacuum chuck for holding a semiconductor wafer during high pressure processing comprises a wafer platen, first through third lift pins, and an actuator mechanism. The wafer platen comprises a smooth surface, first through third lift pin holes, and a vacuum opening. In use, the vacuum opening applies vacuum to a surface of a semiconductor wafer, which chucks the semiconductor wafer to the wafer platen. The first through third lift pins mount within the first through third lift pin holes, respectively. The actuator mechanism couples the first through third lifting pins to the wafer platen. The actuator mechanism operates to extend the first through third lift pins in unison above the smooth surface of the wafer platen. The actuator mechanism operates to retract the first through third lift pins in unison to at least flush with the smooth surface of the wafer platen.

摘要翻译： 用于在高压处理期间保持半导体晶片的真空卡盘包括晶片压板，第一至第三提升销和致动器机构。 晶片台板包括光滑表面，第一至第三提升销孔和真空开口。 在使用中，真空开口对半导体晶片的表面施加真空，半导体晶片将半导体晶片夹在晶圆台板上。 第一至第三提升销分别安装在第一至第三提升销孔内。 致动器机构将第一至第三提升销耦合到晶片压板。 致动器机构用于在晶片压板的平滑表面上同时延伸第一至第三提升销。 致动器机构操作以使第一至第三升降销一致地至少与晶片台板的平滑表面齐平。

公开(公告)号：US06263542B1

公开(公告)日：2001-07-24

申请号：US09338008

申请日：1999-06-22

申请人： Dean Jay Larson ,  Thomas R. Sutton

发明人： Dean Jay Larson ,  Thomas R. Sutton

IPC分类号： H01L2134

CPC分类号： H01L21/67126 ,  E05D3/022 ,  E05D11/084 ,  E05Y2900/60 ,  Y10T16/53834 ,  Y10T16/53885 ,  Y10T16/5402

摘要： A hinge assembly and methods for mounting a hatch relative to a port defined in a cover of a vacuum chamber to close and open the port. A torsion rod mounted between the port and the hatch is in torsion when the hatch is in a closed position relative to the port, assisting port-opening motion. A sleeve surrounds the rod and is movable with the hatch. Friction hinge structures between the cover and the sleeve, and between the hatch and a second sleeve are in a friction-engaging relationship with the corresponding sleeve. Each friction hinge structure provides high resistance to relative motion between a friction spring and the corresponding sleeve. During the port-opening motion of the hatch the friction springs provide low resistance to such relative motion. The hinge structures provide tolerance resistance and vacuum compliance by allowing relative movement between a hinge mounting plate and the hatch. During vacuum pumping, the hinges allow the hatch to move from an O-ring pre-load position, to an intermediate position, and then to a final position so that the pre-loaded O-ring compresses to an operational O-ring compression. Since the hinges permit the O-ring pre-load position to exist prior to vacuum operation and under all variations of certain manufacturing tolerances, the full range of relative motion between the plate and the hatch is permitted, such that the sealing surfaces seal in a tolerance resistance and vacuum compliant manner.

摘要翻译： 铰链组件和用于相对于限定在真空室的盖中的端口安装舱口以闭合和打开端口的方法。 当舱口处于相对于端口的关闭位置时，安装在端口和舱口之间的扭杆处于扭转状态，有助于开启开启运动。 套筒环绕杆，可以用舱口移动。 盖和套筒之间以及舱口与第二套筒之间的摩擦铰链结构与相应的套筒处于摩擦接合关系。 每个摩擦铰链结构为摩擦弹簧和相应的套筒之间的相对运动提供了很高的阻力。 在舱口开口运动期间，摩擦弹簧对这种相对运动提供较低的阻力。 铰链结构通过允许铰链安装板和舱口之间的相对运动来提供公差阻力和真空顺从性。 在真空泵送期间，铰链允许舱口从O形环预载位置移动到中间位置，然后到最终位置，使得预加载的O形环压缩到可操作的O形环压缩。 由于铰链允许在真空操作之前和在某些制造公差的所有变化下存在O形环预加载位置，所以允许板和舱口之间的相对运动的全范围，使得密封表面密封在 耐公差和真空兼容的方式。

公开(公告)号：US4755356A

公开(公告)日：1988-07-05

申请号：US821828

申请日：1986-01-23

申请人： Paul B. Robbins ,  Arthur J. Robbins ,  Thomas R. Sutton

发明人： Paul B. Robbins ,  Arthur J. Robbins ,  Thomas R. Sutton

IPC分类号： B01L3/14 ,  B65D41/18 ,  B65D55/16 ,  G01N21/03

CPC分类号： B01L3/50825 ,  B65D41/185 ,  B65D55/16

摘要： A locking microcentrifuge tube (10) is provided which is capable of being sealed in either of two manners, one being a friction-fit seal which is easily opened and the other being a "locked" seal for higher stress applications. The tube body (12) is adapted to mate with the cap (14) at an aperture (24) such that the plug portion (36) of the cap (14) and the aperture (24) form the friction-fit seal at the early stages of insertion. A collar (26) is provided about the aperture (24) on the tube body (12). The collar (26) is formed to include one or more circumferential projections (28, 30). The cap (14) is formed to include depressions (32, 34) adapted to mate with the projections (28, 30) upon full insertion of the plug portion (36) to create the "locked" seal. The cap (14) is secured to the tube body (12) by a hinge (38) and a tab (40). The primary usage of the locking microcentrifuge tube (10) is in biomedical laboratory analysis. The tube (10) may be manufactured in various volumes and shapes to adapt to different microcentrifuges and desired sample sizes.

摘要翻译： 提供了一种可以以两种方式之一进行密封的锁定微型离心管（10），一种是容易打开的摩擦配合密封件，另一种是用于更高应力应用的“锁定”密封件。 管主体（12）适于在孔（24）处与帽（14）配合，使得帽（14）的插头部分（36）和孔（24）在孔（24）处形成摩擦配合密封 早期插入阶段。 围绕管体（12）上的孔（24）设置套环（26）。 轴环（26）形成为包括一个或多个圆周突起（28,30）。 盖（14）形成为包括在插头部分（36）完全插入时适于与突起（28,30）配合以形成“锁定”密封件的凹陷（32,34）。 盖（14）通过铰链（38）和突片（40）固定到管体（12）。 锁定微量离心管（10）的主要用途是在生物医学实验室分析。 管（10）可以以各种体积和形状制造以适应不同的微量离心机和期望的样品尺寸。