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公开(公告)号：US11796563B2
公开(公告)日：2023-10-24
申请号：US17583727
申请日：2022-01-25
申请人： Carl Zeiss SMT GmbH
发明人： Ulrich Matejka , Christof Baur
CPC分类号： G01Q20/02 , G01Q10/06 , G01Q10/065 , G01Q40/02 , G01Q10/045 , G01Q70/08
摘要： The present application relates to an apparatus for a scanning probe microscope, said apparatus having: (a) at least one first measuring probe having at least one first cantilever, the free end of which has a first measuring tip; (b) at least one first reflective area arranged in the region of the free end of the at least one first cantilever and embodied to reflect at least two light beams in different directions; and (c) at least two first interferometers embodied to use the at least two light beams reflected by the at least one first reflective area to determine the position of the first measuring tip.
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公开(公告)号：US20230296644A1
公开(公告)日：2023-09-21
申请号：US18018613
申请日：2020-08-12
发明人： Ritsuo FUKAYA , Yasuhiro ANDO , Yoshihiro ISOZAKI
摘要： The present invention pertains to a surface analysis device (1) and provides a technology that can increase accuracy and quality of measurement and analysis even when a local deviation is generated in height information of a measurement result of a scanning probe microscope (SPM) (2), due to an atmospheric pressure change with respect to an airtight tank (10). The surface analysis device (1) is provided with: an airtight tank (10); a stage (6) that holds a sample (5) in the airtight tank (10); the SPM (2) that is fixed to a structure configuring the airtight tank (1) and that measures the surface of the sample (5); a sensor (4) that is disposed outside of the airtight tank (10) and that measures atmospheric pressure; and a computer system that analyzes the surface of the sample by using a first signal obtained through measurement by the SPM (2) and a second signal obtained through measurement by the sensor (4).
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3.发明公开公开(公告)号：US20230194566A1
公开(公告)日：2023-06-22
申请号：US18084300
申请日：2022-12-19
发明人： Shenkai Wang , Junmian Zhu , Raymond Blackwell , Felix Fischer
摘要： A scanning tunneling microscope including a z-axis scanning assembly; a quantum tunneling tip operatively connected to the z-axis scanning assembly; a z-axis controller configured to communicate with the z-axis scanning assembly; an x-y scanning assembly including a sample platform for holding a sample to be observed and arranged proximate the quantum tunneling tip separated in a z-axis direction from the platform; an x-y controller configured to communicate with the x-y scanning assembly; a measurement circuit connected to the quantum tunneling tip and the sample platform such that a relative electrical voltage is provided between said quantum tunneling tip and the sample platform and so as to measure an electrical current; and a data processor configured to communicate with the z-axis controller and the x-y controller to receive surface imaging information or point spectral information therefrom.
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公开(公告)号：US09689890B2
公开(公告)日：2017-06-27
申请号：US14590150
申请日：2015-01-06
发明人： Roger Proksch , Jason Cleveland , Dan Bocek , Todd Day , Mario Viani , Clint Callahan
摘要： A controller for cantilever-based instruments, including atomic force microscopes, molecular force probe instruments, high-resolution profilometers and chemical or biological sensing probes. The controller samples the output of the photo-detector commonly used to detect cantilever deflection in these instruments with a very fast analog/digital converter (ADC). The resulting digitized representation of the output signal is then processed with field programmable gate arrays and digital signal processors without making use of analog electronics. Analog signal processing is inherently noisy while digital calculations are inherently “perfect” in that they do not add any random noise to the measured signal. Processing by field programmable gate arrays and digital signal processors maximizes the flexibility of the controller because it can be varied through programming means, without modification of the controller hardware.
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公开(公告)号：US20170131323A1
公开(公告)日：2017-05-11
申请号：US15322969
申请日：2015-07-03
发明人： Hamed Sadeghian Marnani , Jasper Winters , William Edward Crowcombe , Teunis Cornelis van den Dool , Geerten Frans ljsbrand Kramer
摘要： The invention is directed at a method of performing scanning probe microscopy on a substrate surface using a scanning probe microscopy system, the system including at least one probe head, the probe head comprising a probe tip arranged on a cantilever and a tip position detector for determining a position of the probe tip along a z-direction transverse to an image plane, the method comprising: positioning the at least one probe head relative to the substrate surface; moving the probe tip and the substrate surface relative to each other in one or more directions parallel to the image plane for scanning of the substrate surface with the probe tip; and determining the position of the probe tip with the tip position detector during said scanning for mapping nanostructures on the substrate surface; wherein said step of positioning is performed by placing the at least one probe head on a static carrier surface.
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公开(公告)号：US09645169B2
公开(公告)日：2017-05-09
申请号：US14841650
申请日：2015-08-31
申请人： Park Systems Corp.
发明人： Ah Jin Jo , Ju Suk Lee , Yong Sung Cho , Sang Han Chung , Sang-il Park
CPC分类号： G01Q30/06 , G01Q10/04 , G01Q10/06 , G01Q10/065
摘要： A measurement method in which a sensing unit acquires surface data of a measurement target while scanning the surface of the measurement target and at least one of the sensing unit and the measurement target is moved in order for the sensing unit to scan the surface along a plurality of fast scan lines on the surface of the measurement target, includes: a first step in which the sensing unit scans a surface along any one fast scan line of the plurality of fast scan lines to acquire the surface data along the any one fast scan line; and a second step in which the sensing unit acquires a surface data along a fast scan line most adjacent to the any one fast scan line while at least one of the sensing unit and the measurement target is moved along the most adjacent fast scan line, after the first step.
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公开(公告)号：US09575090B2
公开(公告)日：2017-02-21
申请号：US14563826
申请日：2014-12-08
申请人： Bruker Nano, Inc.
发明人： Changchun Liu , Bede Pittenger , Shuiqing Hu , Chanmin Su
CPC分类号： G01Q10/065 , G01Q10/06 , G01Q30/06
摘要： An atomic force microscope (AFM) and corresponding method to provide low force (sub-20 pN) AFM control and mechanical property measurement is provided. The preferred embodiments employ real-time false deflection correction/discrimination by adaptively modifying the drive ramp to accommodate to deflection artifacts.
摘要翻译： 提供了一种原子力显微镜（AFM）和相应的提供低力（sub-20 pN）AFM控制和力学性能测量的方法。 优选实施例通过自适应地修改驱动斜坡以适应偏转伪影来采用实时假偏转校正/辨别。
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公开(公告)号：US20170016933A1
公开(公告)日：2017-01-19
申请号：US15124908
申请日：2015-03-10
申请人： OPENIOLABS LTD
摘要： A method for interrogating a surface of a sample bathed in electrolyte solution using SICM, comprising: controlling the potential between first and second electrodes bathed in the electrolyte solution to induce an ion current in the electrolyte solution, a submerged portion of the first electrode being contained within a micropipette and the second electrode being external to the micropipette; recording the ion current whilst controlling the micropipette to move with respect to a stage supporting the sample; and determining, from the ion current and calibration data, the surface height profile of the sample. Said potential can be controlled according to a spread spectrum modulated signal. Said micropipette motion can be according to an AC mode pattern having a modulation frequency greater than a resonant frequency of an assembly of the micropipette, first electrode and a first piezoelectric actuator configured to control z-axis motion of said micropipette.
摘要翻译： 一种用于询问使用SICM浸在电解质溶液中的样品的表面的方法，包括：控制浸在电解质溶液中的第一和第二电极之间的电位，以引起电解质溶液中的离子电流，第一电极的浸没部分被包含 并且所述第二电极位于所述微量移液管外部; 记录离子电流同时控制微量移液器相对于支撑样品的载物台移动; 以及从离子电流和校准数据确定样品的表面高度分布。 可以根据扩频调制信号来控制所述电位。 所述微量移液管运动可以根据具有大于微量移液管组件的调谐频率的调制频率的AC模式图案，第一电极和被配置为控制所述微量移液管的z轴运动的第一压电致动器。
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公开(公告)号：US09535087B2
公开(公告)日：2017-01-03
申请号：US14752387
申请日：2015-06-26
申请人： UT-Battelle, LLC
发明人： Stephen Jesse , Sergei V. Kalinin
摘要： Scanning probe microscopy may include a method for generating a band excitation (BE) signal and simultaneously exciting a probe at a plurality of frequencies within a predetermined frequency band based on the excitation signal. A response of the probe is measured across a subset of frequencies of the predetermined frequency band and the excitation signal is adjusted based on the measured response.
摘要翻译： 扫描探针显微镜可以包括用于产生带激发（BE）信号并且基于激励信号同时激励在预定频带内的多个频率的探针的方法。 在预定频带的频率子集上测量探针的响应，并且基于所测量的响应来调整激励信号。
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公开(公告)号：US09476908B2
公开(公告)日：2016-10-25
申请号：US14410588
申请日：2013-06-27
摘要： An object is mounted on a surface of a sample carrier. Properties of the surface of the object are measured and/or modified by means of a plurality of independently movable heads, each comprising a microscopic probe. The heads being located between the surface of a reference grid plate and the surface of the sample carrier. Head specific target locations are selected for the heads. Each head is moved over the surface of the reference grid plate, to the target location of the head. During movement a position of the head is determined from markings on the reference grid plate sensed by sensor in the head. When the sensor has indicated that the head is at the target location selected for the head a force between the head and the reference grid plate is switched to seat and/or clamp the head on the reference grid plate.
摘要翻译： 物体安装在样品载体的表面上。 通过多个可独立移动的头来测量和/或修改物体表面的特性，每个头包括微观探针。 头部位于参考栅格板的表面和样品载体的表面之间。 头部具体目标位置被选择。 每个头部移动到参考格栅板的表面，到头部的目标位置。 在运动期间，头部的位置由头部中由传感器感测到的参考网格板上的标记确定。 当传感器已经指示头部位于为头部选择的目标位置时，头部和参考格栅板之间的力被切换以将头部安置和/或夹紧在参考格栅板上。
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