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公开(公告)号:US06312319B1
公开(公告)日:2001-11-06
申请号:US09402596
申请日:2000-04-10
申请人: Timothy J. Donohue , Roger O. Williams , John A. Barber , Jon A. Hoshizaki , Lawrence Lee , Ching-Ling Meng , Phil R. Sommer
发明人: Timothy J. Donohue , Roger O. Williams , John A. Barber , Jon A. Hoshizaki , Lawrence Lee , Ching-Ling Meng , Phil R. Sommer
IPC分类号: B24B100
CPC分类号: B24B53/017 , B24B21/04 , B24B37/04 , B24B53/10
摘要: A polishing media magazine for improved polishing. The polishing media magazine may include a conditioning element for rapid, uniform conditioning and cleaning of the polishing media. The polishing media magazine may include polishing media having sections of raised elevation to contain the fluid and may include a polishing support platen having features adapted to urge the edges of the polishing media upwards. The polishing media may be roll fed from a supply roll across a support platen and onto a take-up roll.
摘要翻译: 用于改进抛光的抛光介质盒。 抛光介质盒可以包括用于对抛光介质进行快速,均匀调节和清洁的调节元件。 抛光介质盒可以包括具有升高高度的部分的抛光介质以容纳流体,并且可以包括具有适于将抛光介质的边缘向上推动的特征的抛光支撑压板。 抛光介质可以从供给辊穿过支撑压板卷到卷取辊上。