公开(公告)号：US20210073651A1

公开(公告)日：2021-03-11

申请号：US17010000

申请日：2020-09-02

Applicant: Tokyo Electron Limited

Inventor： Toshihiro KITAO ,  Haruki OMINE

IPC: G06N3/12

Abstract: A model generating method performed by a computer is provided. First, multiple models are generated by repeatedly executing genetic programming that receives a training data set as an input, and for each of the multiple models, a fitness value that represents a degree of conformity between a corresponding model of the multiple models and the training data set is generated. Next, an indicator is calculated for each of the multiple models, and the multiple models are classified into clusters, by using the indicator calculated for each of the multiple models. Next, a cluster to which the largest number of the models belong is selected from the clusters. Finally, from among models belonging to the selected cluster, a model with the greatest fitness value is selected.

公开(公告)号：US20250013213A1

公开(公告)日：2025-01-09

申请号：US18884523

申请日：2024-09-13

Applicant: Tokyo Electron Limited

Inventor： Ken HIRANO ,  Takari YAMAMOTO ,  Takashi KUBO ,  Haruki OMINE ,  Masaki KITSUNEZUKA ,  Toshihiro KITAO

IPC: G05B13/04 ,  G05B13/02

Abstract: An analysis apparatus, a substrate processing system, a substrate processing apparatus, an analysis method, and an analysis program improve adjustment accuracy in adjusting the temperature of a substrate. The analysis apparatus includes circuitry that performs training to generate a trained model using setting parameters for temperature adjustment elements in regions divided from a substrate support in a process space in a first vacuum environment and using a first temperature data set that is data of temperatures at positions on a substrate supported by the substrate support, and that calculates setting parameters for the temperature adjustment elements corresponding to a target temperature of the substrate using the trained model.