公开(公告)号：US20190006208A1

公开(公告)日：2019-01-03

申请号：US16018417

申请日：2018-06-26

Applicant: TOKYO ELECTRON LIMITED

Inventor： Junnosuke MAKI ,  Shinichiro MISAKA

IPC: H01L21/67 ,  H01L21/687 ,  G06N3/08 ,  H05B3/22

Abstract: A heat treatment apparatus of heating a substrate mounted on a mounting plate heated by a heating part includes: plural types of physical quantity detecting parts for detecting plural types of physical quantities, respectively; a state estimating part for estimating an occurrence probability occurring for each of abnormality modes by a neural network, and including an input layer to which a group of time-series detection values obtained for each of physical quantity detection values detected respectively by the physical quantity detecting parts is inputted; and a selecting part for selecting one of correspondence processes based on the occurrence probability of each of the abnormality modes estimated by the state estimating part. One of the physical quantity detection values is a temperature detection value detected by a temperature physical quantity detecting part for detecting a temperature of the mounting plate among the physical quantity detecting parts.

公开(公告)号：US20230187247A1

公开(公告)日：2023-06-15

申请号：US18077470

申请日：2022-12-08

Applicant: Tokyo Electron Limited

Inventor： Junnosuke MAKI

IPC: H01L21/677 ,  H01L21/67 ,  H01L21/687

CPC classification number: H01L21/67778 ,  H01L21/67742 ,  H01L21/67265 ,  H01L21/68707

Abstract: A detection system configured to detect a state of a structure within a processing space of a substrate processing apparatus, includes: a detection substrate including a state detector that detects the state of the structure; a transfer device that loads and unloads each of a substrate to be processed and the detection substrate into and from the processing space; and a control device, wherein the detection substrate further includes at least one acceleration detector that detects an acceleration in each of two directions intersecting each other in a surface of the substrate, and wherein the control device estimates an orientation of the state detector on the detection substrate within the processing space based on a detection result obtained by the at least one acceleration detector when the detection substrate is moved in a loading/unloading direction during loading or unloading of the detection substrate into or from the processing space.

公开(公告)号：US20220310438A1

公开(公告)日：2022-09-29

申请号：US17701068

申请日：2022-03-22

Applicant: Tokyo Electron Limited

Inventor： Ryo ARAKI ,  Junnosuke MAKI ,  Mitsuteru YANO ,  Masato HAYASHI

IPC: H01L21/683 ,  H01L21/677 ,  H01L21/67

Abstract: An apparatus transfers a substrate. The apparatus includes: one substrate holder adsorbing and holding the substrate via an adsorption port; a nozzle being provided on a surface of the one substrate holder and allowing gas to pass therethrough; an adsorption flow path being connected to the adsorption port and allowing gas to flow therethrough; and a nozzle flow path being connected to the nozzle and allowing the gas to flow therethrough. The adsorption flow path of at least one of the one substrate holder and another substrate holder and the nozzle flow path are connected to a common gas suction mechanism. A pressure sensor and flow rate sensor are provided for the nozzle flow path. The flow rate of the nozzle flow path is varied according to a distance between an interferer and the one substrate holder and the pressure of the nozzle flow path.

公开(公告)号：US20220319893A1

公开(公告)日：2022-10-06

申请号：US17657194

申请日：2022-03-30

Applicant: Tokyo Electron Limited

Inventor： Junnosuke MAKI ,  Koudai HIGASHI ,  Ryo KONISHI ,  Hideki KAJIWARA ,  Hokuto SHIGEMOTO

IPC: H01L21/68 ,  H01L21/67 ,  H01L21/687

Abstract: An information acquisition system is for acquiring information about a substrate processing apparatus including a substrate holder configured to hold and rotate a substrate, a nozzle configured to supply a processing liquid to a surface of the substrate which is rotating, and a cup surrounding the substrate held by the substrate holder. The information acquisition system includes: an information acquisition body held in place of the substrate by the substrate holder and including an imaging part configured to image the cup and acquire image data; and an acquisition part configured to acquire information about a height of the cup based on the image data.

公开(公告)号：US20220223443A1

公开(公告)日：2022-07-14

申请号：US17598077

申请日：2020-03-18

Applicant: TOKYO ELECTRON LIMITED

Inventor： Junnosuke MAKI ,  Masaomi TOYONAGA ,  Atsushi OHTA ,  Motoi OKADA ,  Takuro TSUTSUI ,  Kei SANO ,  Mistsuteru YANO

IPC: H01L21/67 ,  G01L5/00 ,  G05B19/4155

Abstract: A state determination device determines the state of a drive mechanism configured to operate while holding a substrate in a substrate processing apparatus. The state determination part includes: an acquisition part configured to acquire operation data for the drive mechanism; a model generation part configured to generate a monitoring model for the drive mechanism by executing machine learning using an auto-encoder based on normal operation data that is derived from the operation data acquired by the acquisition part when the drive mechanism is operating normally; and a first determination part configured to determine the state of the drive mechanism based on first output data obtained by inputting, to the monitoring model, evaluation data that is derived from the operation data acquired by the acquisition part when the drive mechanism is being evaluated.