公开(公告)号：US20230017389A1

公开(公告)日：2023-01-19

申请号：US17864722

申请日：2022-07-14

Applicant: Tokyo Electron Limited

Inventor： Tatsuhiko TSUJIHASHI ,  Suguru ENOKIDA ,  Kazuki MATSUSHITA

IPC: B65G49/06 ,  B65G47/91

Abstract: A substrate transfer device includes a substrate holder and a base to which the substrate holder is movably attached. The substrate holder includes first and second suction holes provided to be open in a placing surface, first and second protrusions disposed respectively in the first and second suction holes, and first and second supports provided respectively in the vicinity of the first and second suction holes so as to protrude upward from the placing surface. The first protrusion is pressed by a first elastic member toward an upward direction to protrude from the first suction hole such that the first protrusion blocks the first suction hole, and the second protrusion is pressed by a second elastic member toward an upward direction to protrude from the second suction hole such that the second protrusion blocks the second suction hole.