公开(公告)号：US09812297B2

公开(公告)日：2017-11-07

申请号：US14159535

申请日：2014-01-21

申请人： Tokyo Electron Limited

发明人： Keita Kanbara ,  Naoyuki Satoh ,  Takuya Ishikawa

IPC分类号： H01J37/32

CPC分类号： H01J37/32642

摘要： A heat transfer sheet affixing method where a focus ring is pressed by a pressing part to a heat transfer sheet placed on a heat transfer sheet mounting part of a plasma processing apparatus to affix the heat transfer sheet to the focus ring. The method includes reducing a pressure to place the heat transfer sheet in a reduced-pressure atmosphere, heating the heat transfer sheet, and pressing the focus ring by the pressing part to the heat transfer sheet. The reducing, the heating, and the pressing are performed concurrently at least for a predetermined period of time.