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1.发明申请公开(公告)号：US20250102738A1
公开(公告)日：2025-03-27
申请号：US18475944
申请日：2023-09-27
Applicant: Tokyo Electron Limited
Inventor： Ryan BURNS , Michael CARCASI , Robert BRANDT
Abstract: Aspects of the present disclosure provide a method for fabricating a grating coupler. For example, the method can include providing a substrate, forming a plurality of grating elements and a photosensitive material above the substrate, and projecting actinic radiation of varied intensities to expose different regions of the photosensitive material, causing the photosensitive material to generate a solubility-changing agent. The method can also include removing the solubility-changing agent. The actinic radiation of varied intensities can correspond to depths of grooves between the grating elements.
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