公开(公告)号：US20200152472A1

公开(公告)日：2020-05-14

申请号：US16674790

申请日：2019-11-05

Applicant: Tokyo Electron Limited

Inventor： Anton DEVILLIERS ,  Robert BRANDT ,  Jeffrey SMITH ,  Jodi GRZESKOWIAK ,  Daniel FULFORD

IPC: H01L21/3105 ,  H01L21/027 ,  G03F7/004 ,  G03F7/09 ,  G03F7/38 ,  G03F7/16 ,  G03F7/32 ,  G03F7/20

Abstract: Techniques herein include methods for planarizing films including films used in the fabrication of semiconductor devices. Such fabrication can generate structures on a surface of a substrate, and these structures can have a spatially variable density across the surface. Planarization methods herein include depositing a first acid-labile film overtop the structures and the substrate, the first acid-labile film filling between the structures. A second acid-labile film is deposited overtop the first acid-labile film. An acid source film is deposited overtop the second acid-labile film, the acid source film including an acid generator configured to generate an acid in response to receiving radiation having a predetermined wavelength of light. A pattern of radiation is projected over the acid source film, the pattern of radiation having a spatially variable intensity at predetermined areas of the pattern of radiation.

公开(公告)号：US20250102738A1

公开(公告)日：2025-03-27

申请号：US18475944

申请日：2023-09-27

Applicant: Tokyo Electron Limited

Inventor： Ryan BURNS ,  Michael CARCASI ,  Robert BRANDT

IPC: G02B6/34 ,  G02B27/01

Abstract: Aspects of the present disclosure provide a method for fabricating a grating coupler. For example, the method can include providing a substrate, forming a plurality of grating elements and a photosensitive material above the substrate, and projecting actinic radiation of varied intensities to expose different regions of the photosensitive material, causing the photosensitive material to generate a solubility-changing agent. The method can also include removing the solubility-changing agent. The actinic radiation of varied intensities can correspond to depths of grooves between the grating elements.