公开(公告)号：US20240226954A9

公开(公告)日：2024-07-11

申请号：US18490119

申请日：2023-10-19

Applicant: Tokyo Electron Limited

Inventor： Ryunosuke Higashi ,  Kenji Yada ,  Yoshihiro Imura ,  Kohei Kawakami ,  Yuhei Maeda

IPC: B05C11/11 ,  B05C11/10

CPC classification number: B05C11/11 ,  B05C11/1039

Abstract: A cup includes a flow passage forming member forming a first exhaust passage, a scattered substance collection passage configured to collect a scattered substance from a substrate, and a second exhaust passage in sequence as going upwards; a joint exhaust passage connected to each of the first exhaust passage, the scattered substance collection passage, and the second exhaust passage; a first annular member included in the flow passage forming member, the scattered substance collection passage and the first exhaust passage being formed above and below the first annular member, respectively; and a communication hole provided in the flow passage forming member to allow the scattered substance collection passage and the joint exhaust passage to communicate with each other such that a pressure loss of the communication hole is large as compared to a pressure loss in a gap formed between the first annular member and the substrate.

公开(公告)号：US20240131554A1

公开(公告)日：2024-04-25

申请号：US18490119

申请日：2023-10-18

Applicant: Tokyo Electron Limited

Inventor： Ryunosuke Higashi ,  Kenji Yada ,  Yoshihiro Imura ,  Kohei Kawakami ,  Yuhei Maeda

IPC: B05C11/11 ,  B05C11/10

CPC classification number: B05C11/11 ,  B05C11/1039

Abstract: A cup includes a flow passage forming member forming a first exhaust passage, a scattered substance collection passage configured to collect a scattered substance from a substrate, and a second exhaust passage in sequence as going upwards; a joint exhaust passage connected to each of the first exhaust passage, the scattered substance collection passage, and the second exhaust passage; a first annular member included in the flow passage forming member, the scattered substance collection passage and the first exhaust passage being formed above and below the first annular member, respectively; and a communication hole provided in the flow passage forming member to allow the scattered substance collection passage and the joint exhaust passage to communicate with each other such that a pressure loss of the communication hole is large as compared to a pressure loss in a gap formed between the first annular member and the substrate.