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公开(公告)号：US20240131554A1
公开(公告)日：2024-04-25
申请号：US18490119
申请日：2023-10-18
Applicant: Tokyo Electron Limited
Inventor： Ryunosuke Higashi , Kenji Yada , Yoshihiro Imura , Kohei Kawakami , Yuhei Maeda
CPC classification number: B05C11/11 , B05C11/1039
Abstract: A cup includes a flow passage forming member forming a first exhaust passage, a scattered substance collection passage configured to collect a scattered substance from a substrate, and a second exhaust passage in sequence as going upwards; a joint exhaust passage connected to each of the first exhaust passage, the scattered substance collection passage, and the second exhaust passage; a first annular member included in the flow passage forming member, the scattered substance collection passage and the first exhaust passage being formed above and below the first annular member, respectively; and a communication hole provided in the flow passage forming member to allow the scattered substance collection passage and the joint exhaust passage to communicate with each other such that a pressure loss of the communication hole is large as compared to a pressure loss in a gap formed between the first annular member and the substrate.
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公开(公告)号：US11273464B2
公开(公告)日：2022-03-15
申请号：US16986412
申请日：2020-08-06
Applicant: Tokyo Electron Limited
Inventor： Satoshi Shimmura , Yuji Sakai , Kenta Shibasaki , Koji Takayanagi , Kenji Yada , Hiroichi Inada , Shinichi Seki , Kento Ogata
Abstract: A substrate processing apparatus includes a cover member placed to surround a substrate held by a rotary holder; a collecting member placed in an exhaust path formed between the cover member and the rotary holder; and a solvent supply placed above the collecting member and configured to supply a solvent to the collecting member. The solvent supply includes an inner storage space surrounding the substrate; an outer storage space surrounding the inner storage space; and a partition wall extending along a circumferential direction to partition the inner storage space and the outer storage space. Multiple communication holes are extended to penetrate the partition wall such that the solvent introduced into the outer storage space flows to the inner storage space. Multiple dripping holes are extended to penetrate a bottom wall of the inner storage space such that the solvent within the inner storage space drops toward the collecting member.
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3.发明授权公开(公告)号：US09669510B2
公开(公告)日：2017-06-06
申请号：US14533133
申请日：2014-11-05
Applicant: TOKYO ELECTRON LIMITED
Inventor： Akihiro Kubo , Masahiro Fukuda , Taro Yamamoto , Kenji Yada , Masashi Enomoto , Noboru Nakashima
CPC classification number: B24B37/005 , B24B25/00 , B24B27/0061 , B24B37/34 , B24B47/16 , B24D7/18 , H01L21/0209 , H01L21/30625 , H01L21/67046 , H01L21/67253
Abstract: There is disclosed a polishing cleaning mechanism configured to be in contact with a rear surface of a substrate which is held in a substrate holding unit for holding the rear surface of the substrate and perform a polishing process and a cleaning process on the rear surface of the substrate, including a cleaning member configured to clean the rear surface of the substrate, a polishing member configured to polish the rear surface of the substrate, and a support member configured to support the polishing member and the cleaning member to face the rear surface of the substrate held in the substrate holding unit, wherein a surface of the polishing member facing the substrate and a surface of the cleaning member facing the substrate differ in relative height from each other.
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Patent Agency Ranking
公开(公告)号：US11868057B2
公开(公告)日：2024-01-09
申请号：US17485698
申请日：2021-09-27
Applicant: Tokyo Electron Limited
Inventor： Kenta Shibasaki , Hiroichi Inada , Satoshi Shimmura , Koji Takayanagi , Kenji Yada , Shinichi Seki , Akihiro Teramoto
CPC classification number: G03F7/70925 , B05C1/02 , B08B3/08 , G03F7/162
Abstract: A solution treatment apparatus applies a coating solution onto a substrate. The apparatus includes a holder holding and rotating the substrate; a coating solution supplier supplying the coating solution to the substrate on the holder; and an inner cup surrounding the holder from a lateral side and having a peripheral edge side upper surface inclining down outward in a radial direction from an apex part located below a peripheral edge side of the substrate on the holder. The inner cup has discharge ports formed along a circumferential direction at the apex part; and the discharge ports are formed to discharge a cleaning solution and make the cleaning solution flow down along the peripheral edge side upper surface of the inner cup, thereby cleaning the peripheral edge side upper surface, and to discharge the cleaning solution outward in the radial direction and obliquely upward.
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5.发明授权公开(公告)号：US10328546B2
公开(公告)日：2019-06-25
申请号：US15499402
申请日：2017-04-27
Applicant: TOKYO ELECTRON LIMITED
Inventor： Akihiro Kubo , Masahiro Fukuda , Taro Yamamoto , Kenji Yada , Masashi Enomoto , Noboru Nakashima
IPC: B24D7/18 , B24B25/00 , B24B27/00 , B24B37/34 , B24B47/16 , B24B49/16 , H01L21/02 , H01L21/67 , B24B37/005 , H01L21/306
Abstract: There is disclosed a polishing cleaning mechanism configured to be in contact with a rear surface of a substrate which is held in a substrate holding unit for holding the rear surface of the substrate and perform a polishing process and a cleaning process on the rear surface of the substrate, including a cleaning member configured to clean the rear surface of the substrate, a polishing member configured to polish the rear surface of the substrate, and a support member configured to support the polishing member and the cleaning member to face the rear surface of the substrate held in the substrate holding unit, wherein a surface of the polishing member facing the substrate and a surface of the cleaning member facing the substrate differ in relative height from each other.
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公开(公告)号：US20240226954A9
公开(公告)日：2024-07-11
申请号：US18490119
申请日：2023-10-19
Applicant: Tokyo Electron Limited
Inventor： Ryunosuke Higashi , Kenji Yada , Yoshihiro Imura , Kohei Kawakami , Yuhei Maeda
CPC classification number: B05C11/11 , B05C11/1039
Abstract: A cup includes a flow passage forming member forming a first exhaust passage, a scattered substance collection passage configured to collect a scattered substance from a substrate, and a second exhaust passage in sequence as going upwards; a joint exhaust passage connected to each of the first exhaust passage, the scattered substance collection passage, and the second exhaust passage; a first annular member included in the flow passage forming member, the scattered substance collection passage and the first exhaust passage being formed above and below the first annular member, respectively; and a communication hole provided in the flow passage forming member to allow the scattered substance collection passage and the joint exhaust passage to communicate with each other such that a pressure loss of the communication hole is large as compared to a pressure loss in a gap formed between the first annular member and the substrate.
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公开(公告)号：US12007692B2
公开(公告)日：2024-06-11
申请号：US18077577
申请日：2022-12-08
Applicant: Tokyo Electron Limited
Inventor： Hiroki Sakurai , Nobuhiro Ogata , Daisuke Goto , Kanta Mori , Kenji Yada , Yusuke Hashimoto , Shoki Mizuguchi , Yenrui Hsu
CPC classification number: G03F7/3021 , G03F7/426
Abstract: A nozzle that mixes fluid containing steam or mist of pressurized pure water and processing liquid containing at least sulfuric acid and ejects mixed fluid of the fluid and the processing liquid, the nozzle comprising: at least one first ejection port ejecting the fluid; at least one second ejection port ejecting the processing liquid; and at least one lead-out path being in fluid communication with the at least one first ejection port and the at least one second ejection port and leading out the mixed fluid of the fluid ejected from the at least one first ejection port and the processing liquid ejected from the at least one second ejection port, wherein the at least one first ejection port or the at least one second ejection port is arranged to be directed to position deviated from central axis of the at least one lead-out path in a plan view.
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公开(公告)号：US20210039131A1
公开(公告)日：2021-02-11
申请号：US16986412
申请日：2020-08-06
Applicant: Tokyo Electron Limited
Inventor： Satoshi Shimmura , Yuji Sakai , Kenta Shibasaki , Koji Takayanagi , Kenji Yada , Hiroichi Inada , Shinichi Seki , Kento Ogata
Abstract: A substrate processing apparatus includes a cover member placed to surround a substrate held by a rotary holder; a collecting member placed in an exhaust path formed between the cover member and the rotary holder; and a solvent supply placed above the collecting member and configured to supply a solvent to the collecting member. The solvent supply includes an inner storage space surrounding the substrate; an outer storage space surrounding the inner storage space; and a partition wall extending along a circumferential direction to partition the inner storage space and the outer storage space. Multiple communication holes are extended to penetrate the partition wall such that the solvent introduced into the outer storage space flows to the inner storage space. Multiple dripping holes are extended to penetrate a bottom wall of the inner storage space such that the solvent within the inner storage space drops toward the collecting member.
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