公开(公告)号：US20170154799A1

公开(公告)日：2017-06-01

申请号：US15428896

申请日：2017-02-09

Applicant: Tokyo Electron Limited

Inventor： Shinji WAKABAYASHI ,  Keisuke KONDOH ,  Sensho KOBAYASHI

IPC: H01L21/677

CPC classification number: H01L21/67772 ,  B65G2201/0297 ,  H01L21/67769

Abstract: A substrate transfer chamber for unloading the substrates from the containers includes a housing-shaped main body and a plurality of container connecting mechanisms to which the containers are connected. In the main body, some of the container connecting mechanisms are arranged on top of one another in a height direction of the main body.

公开(公告)号：US20150098788A1

公开(公告)日：2015-04-09

申请号：US14507724

申请日：2014-10-06

Applicant: Tokyo Electron Limited

Inventor： Shinji WAKABAYASHI ,  Keisuke KONDOH ,  Sensho KOBAYASHI

IPC: B65G65/00

CPC classification number: H01L21/67772 ,  B65G2201/0297 ,  H01L21/67769

Abstract: A substrate transfer chamber for unloading the substrates from the containers includes a housing-shaped main body and a plurality of container connecting mechanisms to which the containers are connected. In the main body, some of the container connecting mechanisms are arranged on top of one another in a height direction of the main body.

Abstract translation: 用于从容器卸载基板的基板传送室包括壳体形状的主体和容器连接到的多个容器连接机构。 在主体中，一些容器连接机构在主体的高度方向上相互排列。

公开(公告)号：US20140240484A1

公开(公告)日：2014-08-28

申请号：US14174506

申请日：2014-02-06

Applicant: TOKYO ELECTRON LIMITED

Inventor： Toshiaki KODAMA ,  Toru YAMAUCHI ,  Sensho KOBAYASHI ,  Hiroshi NAKAMURA ,  Gaku IKEDA ,  Kazuya UOYAMA

IPC: G06T7/00 ,  G02B27/01 ,  H04N7/18

CPC classification number: G02B27/017 ,  G02B2027/0138 ,  G02B2027/014 ,  H01L21/67288

Abstract: A support information display method is provided with an acquiring process for acquiring a first image by photographing, via a camera provided in a head mount display, a predetermined part of a substrate processing apparatus as a maintenance object, an estimating process for estimating the support information related to the predetermined part in the first image from information stored in a database, an image creating process for creating a second image by converting the support information estimated in the estimating process into an image, and a displaying process for displaying the second image on the head mount display in order for the operator to visually recognize the support information.

Abstract translation: 支持信息显示方法具有获取处理，用于通过头戴式显示器中提供的照相机拍摄作为维护对象的基板处理装置的预定部分来拍摄第一图像，用于估计支持信息的估计处理 与存储在数据库中的信息相关的第一图像中的预定部分，通过将在估计处理中估计的支持信息转换为图像来创建第二图像的图像创建处理，以及用于在第一图像中显示第二图像的显示处理 头戴式显示器，以便操作者可视地识别支持信息。