公开(公告)号：US20140357016A1

公开(公告)日：2014-12-04

申请号：US14291164

申请日：2014-05-30

Applicant: Tokyo Electron Limited

Inventor： Takashi Fuse ,  Setsuko Shibuya

IPC: H01L51/00 ,  B05C9/12

CPC classification number: B05C9/12 ,  B05D1/60 ,  B05D3/063 ,  B05D3/064 ,  B05D3/067 ,  B05D7/02 ,  C23C16/45536

Abstract: An organic molecular film forming apparatus 100 of forming an organic molecular film on a processing target object includes a processing chamber 11 that accommodates therein the processing target object; an organic material gas supplying unit 2 that supplies an organic material gas into the processing chamber 11; and an ultraviolet ray irradiating unit 13 that irradiates ultraviolet ray to at least one of the processing target object, the organic material gas supplied to the processing target object, and a film formed on a surface of the processing target object. At least one of the surface of the processing target object and the organic molecular film formed thereon is activated by irradiating the ultraviolet ray from the ultraviolet ray irradiating unit 13 to at least one of the processing target object, the organic material gas supplied to the processing target object, and the film formed on the processing target object.

Abstract translation: 在加工对象物上形成有机分子膜的有机分子膜形成装置100包括容纳处理对象物的处理室11， 有机材料气体供给单元2，其将有机材料气体供给到处理室11中; 以及紫外线照射单元13，其将紫外线照射到处理对象物体中的至少一个，供给到处理对象物体的有机材料气体和形成在处理对象物体的表面上的膜。 通过将紫外线照射单元13的紫外线照射到加工对象物中的至少一个，供给到处理对象物中的有机材料气体中的至少一个来激活加工对象物的表面和形成于其上的有机分子膜中的至少一个 目标对象和形成在处理目标对象上的胶片。