公开(公告)号：US11989876B2

公开(公告)日：2024-05-21

申请号：US18143949

申请日：2023-05-05

Applicant: Tokyo Electron Limited

Inventor： Shin-Yee Lu ,  Ivan Maleev

IPC: G06T7/00 ,  G06N3/08 ,  G06T5/20 ,  G06T5/40

CPC classification number: G06T7/001 ,  G06N3/08 ,  G06T5/20 ,  G06T5/40 ,  G06T2207/20061 ,  G06T2207/20081 ,  G06T2207/20084 ,  G06T2207/30148

Abstract: A method for detecting defects on a sample based on a defect inspection apparatus is provided. In the method, an image data set that includes defect data and non-defect data is organized. A convolutional neural network (CNN) model is defined. The CNN model is trained based on the image data set. The defects on the sample are detected based on inspection data of the defect inspection apparatus and the CNN model. The sample includes uniformly repeating structures, and the inspection data of the defect inspection apparatus is generated by filtering out signals of the uniformly repeating structures of the sample.

公开(公告)号：US11676266B2

公开(公告)日：2023-06-13

申请号：US17089158

申请日：2020-11-04

Applicant: Tokyo Electron Limited

Inventor： Shin-Yee Lu ,  Ivan Maleev

IPC: G06K9/00 ,  G06T7/00 ,  G06T5/40 ,  G06T5/20 ,  G06N3/08

CPC classification number: G06T7/001 ,  G06N3/08 ,  G06T5/20 ,  G06T5/40 ,  G06T2207/20061 ,  G06T2207/20081 ,  G06T2207/20084 ,  G06T2207/30148

Abstract: A method for detecting defects on a sample based on a defect inspection apparatus is provided. In the method, an image data set that includes defect data and non-defect data is organized. A convolutional neural network (CNN) model is defined. The CNN model is trained based on the image data set. The defects on the sample are detected based on inspection data of the defect inspection apparatus and the CNN model. The sample includes uniformly repeating structures, and the inspection data of the defect inspection apparatus is generated by filtering out signals of the uniformly repeating structures of the sample.