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公开(公告)号：US11639947B2
公开(公告)日：2023-05-02
申请号：US17116201
申请日：2020-12-09
发明人： Kenta Saiki , Takuya Ishida
摘要： A method of detecting a foreign object on a stage according to one aspect of the present disclosure includes acquiring first position information of a first pattern included in a first image in a reference state of a surface of the stage capable of attracting an object to be inspected; acquiring second position information of a second pattern included in a second image of the surface, the second image being obtained after obtaining the first image; and detecting one or more foreign objects on the surface by comparing the first position information and the second position information.
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