公开(公告)号：US20250140590A1

公开(公告)日：2025-05-01

申请号：US18921728

申请日：2024-10-21

Applicant: Tokyo Electron Limited

Inventor： Toshiaki KODAMA ,  Tatsuru Okamura

IPC: H01L21/68 ,  G05B19/418 ,  H01L21/687

Abstract: Provided is a teaching method for teaching a transfer position of a consumable member in a cassette included in a substrate processing system, the substrate processing system having a transfer device configured to transfer the consumable member, and a storage module where the cassette accommodating a plurality of the consumable members is set; the teaching method comprising the steps of: (A) recognizing setting of the cassette in the storage module; and (B) after the step (A), detecting the cassette by a sensor of the transfer device and calculating three-dimensional coordinates of the cassette based on detection information of the sensor.