公开(公告)号：US20250140590A1

公开(公告)日：2025-05-01

申请号：US18921728

申请日：2024-10-21

Applicant: Tokyo Electron Limited

Inventor： Toshiaki KODAMA ,  Tatsuru Okamura

IPC: H01L21/68 ,  G05B19/418 ,  H01L21/687

Abstract: Provided is a teaching method for teaching a transfer position of a consumable member in a cassette included in a substrate processing system, the substrate processing system having a transfer device configured to transfer the consumable member, and a storage module where the cassette accommodating a plurality of the consumable members is set; the teaching method comprising the steps of: (A) recognizing setting of the cassette in the storage module; and (B) after the step (A), detecting the cassette by a sensor of the transfer device and calculating three-dimensional coordinates of the cassette based on detection information of the sensor.

公开(公告)号：US20210253365A1

公开(公告)日：2021-08-19

申请号：US17174755

申请日：2021-02-12

Applicant: TOKYO ELECTRON LIMITED

Inventor： Toshiaki KODAMA

IPC: B65G47/90 ,  H01L21/687 ,  H01L21/677

Abstract: There is provided a transfer device comprising a transfer arm to which a pick is attached and an inclination adjusting mechanism disposed below the transfer arm and configured to adjust an inclination of the transfer arm. The inclination adjusting mechanism includes an upper portion fixed to a lower portion of the transfer arm, a lower portion disposed below the upper portion to face the upper portion, a support portion that rotatably supports the upper portion with respect to the lower portion, and at least two actuators disposed between the upper portion and the lower portion.

公开(公告)号：US20240087936A1

公开(公告)日：2024-03-14

申请号：US18273318

申请日：2022-01-17

Applicant: Tokyo Electron Limited

Inventor： Toshiaki KODAMA ,  Takeshi NIIDOME

IPC: H01L21/677 ,  G01J5/48 ,  H01L21/67 ,  H01L21/68

CPC classification number: H01L21/67778 ,  G01J5/48 ,  H01L21/67196 ,  H01L21/67248 ,  H01L21/67766 ,  H01L21/681

Abstract: A substrate processing system is provided with: a substrate processing apparatus including a loading/unloading port for a substrate and configured to execute predetermined processing on the substrate; a transfer device connected to the substrate processing apparatus via an opening/closing mechanism configured to open/close the loading/unloading port, and including a substrate transfer mechanism configured to load and unload the substrate into and from the substrate processing apparatus via the loading/unloading port; a thermal image generator provided on the substrate transfer mechanism and configured to generate a thermal image; and a control device. The control device is configured to: open, by the opening/closing mechanism, the loading/unloading port at a time at least either before or after the substrate processing apparatus executes the predetermined processing; and generate, by the thermal image generator, an in-apparatus thermal image as the thermal image indicating a temperature distribution inside the substrate processing apparatus.

公开(公告)号：US20220365187A1

公开(公告)日：2022-11-17

申请号：US17661302

申请日：2022-04-29

Applicant: Tokyo Electron Limited

Inventor： Toshiaki KODAMA ,  Shinji WAKABAYASHI ,  Takehiro SHINDO ,  Tatsuru OKAMURA

IPC: G01S7/497 ,  G01S17/08 ,  H01J37/32 ,  G01S17/88

Abstract: A substrate processing system includes: a substrate processing apparatus including a stage on which a substrate and an annular member are placed; a substrate transport mechanism including a substrate holder; a distance sensor provided in the substrate holder; and a control device, wherein the substrate transport mechanism is configured to place a jig substrate having a reference surface as a reference for a height of the annular member on the stage, wherein the distance sensor is configured to measure a distance from the substrate holder positioned above the stage to the reference surface of the jig substrate and a distance from the substrate holder to the annular member, and wherein the control device is configured to estimate the height of the annular member based on a measurement result of the distance to the reference surface and a measurement result of the distance to the annular member.

公开(公告)号：US20240290645A1

公开(公告)日：2024-08-29

申请号：US18655619

申请日：2024-05-06

Applicant: Tokyo Electron Limited

Inventor： Takehiro SHINDO ,  Toshiaki KODAMA

IPC: H01L21/677

CPC classification number: H01L21/67745 ,  H01L21/67742 ,  H01L21/67748

Abstract: An apparatus for transporting a substrate includes a transport chamber including a wall having an opening through which carry-in/out of the substrate to/from the substrate processing chamber is performed and a movement surface having a first magnet, a transport module accommodated in the transport chamber to hold the substrate, including a second magnet to which a magnetic force is applied, and configured to be movable along the movement surface in a floating state from the movement surface, an angle adjusting mechanism provided in the transport chamber to switch an angle of the movement surface between a first angle and a second angle which is closer to a vertical state than the first angle, and a transport passage forming a portion of the transport chamber, and including the movement surface at the second angle to which the movement surface switched to the second angle can be connected.

公开(公告)号：US20220319889A1

公开(公告)日：2022-10-06

申请号：US17656431

申请日：2022-03-25

Applicant: Tokyo Electron Limited

Inventor： Takehiro SHINDO ,  Toshiaki KODAMA

IPC: H01L21/677

Abstract: An apparatus for transporting a substrate includes a transport chamber including a wall having an opening through which carry-in/out of the substrate to/from the substrate processing chamber is performed and a movement surface having a first magnet, a transport module accommodated in the transport chamber to hold the substrate, including a second magnet to which a magnetic force is applied, and configured to be movable along the movement surface in a floating state from the movement surface, an angle adjusting mechanism provided in the transport chamber to switch an angle of the movement surface between a first angle and a second angle which is closer to a vertical state than the first angle, and a transport passage forming a portion of the transport chamber, and including the movement surface at the second angle to which the movement surface switched to the second angle can be connected.

公开(公告)号：US20170028547A1

公开(公告)日：2017-02-02

申请号：US15212838

申请日：2016-07-18

Applicant: TOKYO ELECTRON LIMITED

Inventor： Toshiaki KODAMA

IPC: B25J9/06 ,  H01L21/687 ,  H01L21/67 ,  B25J9/00

CPC classification number: B25J9/0048 ,  B25J9/102 ,  B25J9/107 ,  H01L21/67742 ,  H02K49/102

Abstract: A posture holding device is for use in a transfer device which has a holding part configured to hold an object and a first link and a second link connected to the holding part. The transfer device moves the first link and the second link relative to the holding part so as to move the holding part between a transfer position and a standby position. The posture holding device holds a posture of the holding part and includes a magnetic gear rotatably connecting the first link and the second link to the holding part. The magnetic gear is disposed such that the one end of the first link connected to the holding part is rotated about a first axis and the one end of the second link connected to the holding part is rotated about the first axis or a second axis different from the first axis.

Abstract translation: 姿势保持装置用于具有被配置为保持物体的保持部分和连接到保持部分的第一连杆和第二连杆的传送装置。 传送装置相对于保持部移动第一连杆和第二连杆，以使保持部分在传送位置和待机位置之间移动。 姿势保持装置保持保持部的姿势，并且包括将第一连杆和第二连杆可旋转地连接到保持部的磁齿轮。 磁齿轮被设置成使得连接到保持部件的第一连杆的一端围绕第一轴线旋转，并且连接到保持部件的第二连杆的一端围绕第一轴线旋转，或者不同于第二轴线的第二轴线 第一轴。

公开(公告)号：US20250140591A1

公开(公告)日：2025-05-01

申请号：US18921771

申请日：2024-10-21

Applicant: Tokyo Electron Limited

Inventor： Toshiaki KODAMA

IPC: H01L21/68 ,  G05B19/418 ,  H01L21/687

Abstract: Provided is a method for controlling a substrate processing system comprising: detecting a distance between the first fork and the placing table by a distance sensor provided at the first fork; adjusting a height position of the first fork based on the detection value of the distance sensor; setting the adjusted height position of the first fork as a transfer height of the first fork; detecting a first touch position where lift pins of the placing table are brought into contact with the first object; unloading the first fork holding the first object; detecting a second touch position where the lift pins of the placing table are brought into contact with the second object; setting a transfer height of the second fork based on a difference between the first touch position and the second touch position; and unloading the second fork holding the second object.

公开(公告)号：US20250125173A1

公开(公告)日：2025-04-17

申请号：US18905097

申请日：2024-10-02

Applicant: Tokyo Electron Limited

Inventor： Toshiaki KODAMA ,  Takumi HIRANO

IPC: H01L21/67 ,  H01L21/677 ,  H01L21/68 ,  H01L21/687

Abstract: Provided is a calibration method for calibrating a sensor in a system including a transfer device for transferring an object, and the sensor for detecting the object to recognize a position of the object that is being transferred by the transfer device, the method comprising: (A) placing the object on a support part configured to support the object such that a center position of the object is located within an allowable range from a center position of the support part; and (B) after said (A), holding and transferring the object placed on the support part by the transfer device, detecting the object that is being transferred by the sensor, and calibrating the position of the object detected by the sensor.

公开(公告)号：US20240228190A1

公开(公告)日：2024-07-11

申请号：US18289525

申请日：2021-08-11

Applicant: TOKYO ELECTRON LIMITED

Inventor： Toshiaki KODAMA ,  Wataru MATSUMOTO

IPC: B65G47/90 ,  H01L21/677 ,  H01L21/687

CPC classification number: B65G47/905 ,  H01L21/677 ,  H01L21/68707

Abstract: In the present invention, an articulated arm is configured so that a plurality of arms are connected by rotatable joints, and by rotating the joints, the articulated arm can be extended and contracted. A detection unit detects the angle of rotation of the joints of the articulated arm, for different postures the number of which is at least the number of arms of the articulated arm. A calculation unit calculates the expansion amount of each of the plurality of arms on the basis of the angle of rotation of the joints at each of the postures detected by the detection unit.