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公开(公告)号：US20210398782A1
公开(公告)日：2021-12-23
申请号：US17348999
申请日：2021-06-16
Applicant: Tokyo Electron Limited
Inventor： Michishige SAITO , Yousuke NAGAHATA
IPC: H01J37/32
Abstract: A high frequency power supply member for supplying high frequency power includes: an inner conductor that forms a hollow; and an outer conductor arranged to surround the inner conductor, wherein a refrigerant flow path is provided inside a wall surface of at least one of the inner conductor and the outer conductor.
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