公开(公告)号：US20210384017A1

公开(公告)日：2021-12-09

申请号：US17336890

申请日：2021-06-02

Applicant: Tokyo Electron Limited

Inventor： Takaaki NEZU ,  Yuta YAMATO ,  Akiyoshi KAWASHIMA ,  Hiroki INADUMA ,  Kazuyuki MIURA

IPC: H01J37/32

Abstract: The present invention efficiently captures a target object contained in an exhaust gas. A trap apparatus includes a tubular housing including a flow path through which an exhaust gas exhausted through an exhaust pipe flows, a plate-shaped first trap member arranged inside the housing so as to shield a central portion of the flow path when viewed in a direction along a central axis of the housing, and a plate-shaped second trap member arranged inside the housing at an interval from the first trap member in the direction along the central axis of the housing, the second trap member including an opening at a position corresponding to the first trap member.