公开(公告)号：US20030099022A1

公开(公告)日：2003-05-29

申请号：US10159042

申请日：2002-06-03

Applicant: Tokyo Seimitsu (Israel) Ltd.

Inventor： Jacob Karin ,  Arie Shahar ,  Gilad Golan

IPC: G02B026/08

CPC classification number: G01N21/956 ,  G01N2201/1047 ,  Y10S359/90

Abstract: A method to compare similar physical areas of an inspection area using a scanning arrangement. The inspection area has a periodic pattern having a repeat vector. The scanning arrangement has a stage, a drive mechanism and at least one circular scanner. The circular scanner has a scanning head and an axis of rotation about which the scanning head performs a circular scanning motion. The drive mechanism is configured to provide relative movement between the stage and the axis of rotation. The method includes the steps of: scanning the inspection area by a combination of circular scanning of the scanning head and by generating relative movement between the stage and the axis of rotation such that pairs of curved scanning paths are related by an integer multiple of the repeat vector; and comparing at least one of said pairs of the curved scanning paths by a pixel to pixel comparison.

Abstract translation: 使用扫描装置来比较检查区域的类似物理区域的方法。 检查区域具有具有重复向量的周期性图案。 扫描装置具有平台，驱动机构和至少一个圆形扫描仪。 圆形扫描仪具有扫描头和旋转轴，扫描头围绕该旋转轴执行圆形扫描运动。 驱动机构被配置为提供台架和旋转轴线之间的相对移动。 该方法包括以下步骤：通过扫描头的圆形扫描的组合扫描检查区域，并通过产生台与旋转轴之间的相对运动，使得成对的弯曲扫描路径与重复的整数倍相关 向量; 以及通过像素比较比较所述曲线扫描路径对中的至少一个。

公开(公告)号：US20030081826A1

公开(公告)日：2003-05-01

申请号：US10193113

申请日：2002-07-12

Applicant: Tokyo Seimitsu (Israel) Ltd.

Inventor： Jacob Karin ,  Arie Shahar ,  Gilad Golan

IPC: G06K009/00

CPC classification number: G06T7/0004 ,  G06T1/0007 ,  G06T7/0002 ,  G06T7/49 ,  G06T2207/30141 ,  G06T2207/30148

Abstract: A method to scan a surface having a periodic pattern using a scanner. The periodic pattern has a first direction of periodicity having a periodic length. The scanner is configured to produce an image having a plurality of pixels, each of the pixels having a pixel origin. The method includes the steps of positioning the first direction of periodicity of the periodic pattern at an angle relative to the scanning direction of the scanner and scanning the surface by generating relative movement between the scanner and the surface.

Abstract translation: 使用扫描仪扫描具有周期性图案的表面的方法。 周期性图案具有具有周期长度的周期性的第一方向。 扫描器被配置为产生具有多个像素的图像，每个像素具有像素原点。 该方法包括以下步骤：将周期性图案的周期性的第一方向相对于扫描仪的扫描方向定位成一定角度，并通过产生扫描仪和表面之间的相对运动来扫描表面。