公开(公告)号：US5917590A

公开(公告)日：1999-06-29

申请号：US944908

申请日：1997-10-06

Applicant: Peter F. Greve

Inventor： Peter F. Greve

IPC: G01N21/47 ,  G01N21/88 ,  G01N21/956 ,  G03F7/20

CPC classification number: G03F7/70483 ,  G01N21/8806 ,  G01N2021/95676 ,  G01N2201/0636 ,  G01N2201/1047

Abstract: A description is given of an optical inspection device for inspecting two oppositely located surfaces (3, 4) of a transparent object (1), for example a lithographic mask. The device is constructed in such a manner that for each inspection beam (a, c) the radiation path to the surface to be inspected (3, 4) is substantially equal to the radiation path from the surface to be inspected to a detector (29, 40), so that these paths comprise the same scanning element (10), preferably a mirror polygon. By virtue thereof, the radiation spots formed on the detectors are stationary and an inspection signal having a good signal-to-noise ratio is obtained.

Abstract translation: 给出了用于检查透明物体（1）的两个相对定位的表面（3,4）的光学检查装置的描述，例如光刻掩模。 该装置被构造成使得对于每个检查光束（a，c），待检查表面（3,4）的辐射路径基本上等于从被检测表面到检测器（29）的辐射路径 ，40），使得这些路径包括相同的扫描元件（10），优选地是镜多边形。 由此，形成在检测器上的辐射点是静止的，并且获得具有良好信噪比的检查信号。

公开(公告)号：US20240361252A1

公开(公告)日：2024-10-31

申请号：US18291088

申请日：2022-08-22

Applicant: LG ENERGY SOLUTION, LTD.

Inventor： Tae Young KIM ,  Seung Gyun HONG

IPC: G01N21/952 ,  G01N21/88

CPC classification number: G01N21/952 ,  G01N21/8806 ,  G01N2021/8816 ,  G01N2201/1047 ,  G01N2201/1053

Abstract: A side surface inspection device is provided for a cylindrical battery having a side surface defining a first region and a second region as a remainder of the side surface. The device includes a first light to emit light to the side surface of the cylindrical battery; a first mirror and a second mirror on respective sides of the cylindrical battery to each reflect light from respective portions of the first region of the cylindrical battery; and a camera to capture a first image from the light reflected by the first mirror, and to capture a second image from the light reflected by the second mirror. The first region of the cylindrical battery is more than half of the side surface of the cylindrical battery. The first and second images corresponds to a full region of the first region of the cylindrical battery.

公开(公告)号：US07528374B2

公开(公告)日：2009-05-05

申请号：US11366540

申请日：2006-03-03

Applicant: Asbjorn Smitt ,  Jason Lee ,  Sung Woon Lee ,  Sigird Smitt-Jeppesen

Inventor： Asbjorn Smitt ,  Jason Lee ,  Sung Woon Lee ,  Sigird Smitt-Jeppesen

IPC: G01J5/02

CPC classification number: G01J3/02 ,  G01J3/0202 ,  G01J3/0208 ,  G01J3/0232 ,  G01N21/6452 ,  G01N2201/10 ,  G01N2201/1047

Abstract: An apparatus for optical sensing of samples includes an optical source, an optical assembly, a sample holder, an objective lens, and a detector. The objective lens collimates light emitted by the sample. Preferably, the optical assembly rotates about an axis, allowing the sensing apparatus to sense results from plural locations on a sample without moving the sample. Moving the sample in a linear direction while rotating the optical assembly allows sensing of an entire sample. Preferably, light from the optical source enters the optical assembly along the axis of rotation. Sensing methods consistent with the invention are also described.

Abstract translation: 用于光学感测样品的装置包括光源，光学组件，样品保持器，物镜和检测器。 物镜准直样品发出的光。 优选地，光学组件围绕轴旋转，允许感测装置感测样品上多个位置的结果，而不移动样品。 旋转光学组件时沿直线方向移动样品可以检测整个样品。 优选地，来自光源的光沿旋转轴进入光学组件。 还描述了与本发明一致的感测方法。

公开(公告)号：US06603589B2

公开(公告)日：2003-08-05

申请号：US10159042

申请日：2002-06-03

Applicant: Jacob Karin ,  Arie Shahar ,  Gilad Golan

Inventor： Jacob Karin ,  Arie Shahar ,  Gilad Golan

IPC: G02B2608

CPC classification number: G01N21/956 ,  G01N2201/1047 ,  Y10S359/90

Abstract: A method to compare similar physical areas of an inspection area using a scanning arrangement. The inspection area has a periodic pattern having a repeat vector. The scanning arrangement has a stage, a drive mechanism and at least one circular scanner. The circular scanner has a scanning head and an axis of rotation about which the scanning head performs a circular scanning motion. The drive mechanism is configured to provide relative movement between the stage and the axis of rotation. The method includes the steps of: scanning the inspection area by a combination of circular scanning of the scanning head and by generating relative movement between the stage and the axis of rotation such that pairs of curved scanning paths are related by an integer multiple of the repeat vector; and comparing at least one of said pairs of the curved scanning paths by a pixel to pixel comparison.

公开(公告)号：US20090194699A1

公开(公告)日：2009-08-06

申请号：US12382923

申请日：2009-03-26

Applicant: Asbjom Smitt ,  Jason Lee ,  Sung Woon Lee ,  Sigird Smitt-Jeppesen

Inventor： Asbjom Smitt ,  Jason Lee ,  Sung Woon Lee ,  Sigird Smitt-Jeppesen

IPC: G01J5/02 ,  G01J1/58

CPC classification number: G01J3/02 ,  G01J3/0202 ,  G01J3/0208 ,  G01J3/0232 ,  G01N21/6452 ,  G01N2201/10 ,  G01N2201/1047

Abstract: An apparatus for optical sensing of samples includes an optical source, an optical assembly, a sample holder, an objective lens, and a detector. The objective lens collimates light emitted by the sample. Preferably, the optical assembly rotates about an axis, allowing the sensing apparatus to sense results from plural locations on a sample without moving the sample. Moving the sample in a linear direction while rotating the optical assembly allows sensing of an entire sample. Preferably, light from the optical source enters the optical assembly along the axis of rotation. Sensing methods consistent with the invention are also described.

Abstract translation: 用于光学感测样品的装置包括光源，光学组件，样品保持器，物镜和检测器。 物镜准直样品发出的光。 优选地，光学组件围绕轴旋转，允许感测装置感测样品上多个位置的结果，而不移动样品。 旋转光学组件时沿直线方向移动样品可以检测整个样品。 优选地，来自光源的光沿旋转轴进入光学组件。 还描述了与本发明一致的感测方法。

公开(公告)号：US20070205365A1

公开(公告)日：2007-09-06

申请号：US11366540

申请日：2006-03-03

Applicant: Asbjorn Smitt ,  Jason Lee ,  Sung Lee ,  Sigrid Smitt-Jeppesen

Inventor： Asbjorn Smitt ,  Jason Lee ,  Sung Lee ,  Sigrid Smitt-Jeppesen

IPC: G01J5/02

CPC classification number: G01J3/02 ,  G01J3/0202 ,  G01J3/0208 ,  G01J3/0232 ,  G01N21/6452 ,  G01N2201/10 ,  G01N2201/1047

Abstract: An apparatus for optical sensing of samples includes an optical source, an optical assembly, a sample holder, an objective lens, and a detector. The objective lens collimates light emitted by the sample. Preferably, the optical assembly rotates about an axis, allowing the sensing apparatus to sense results from plural locations on a sample without moving the sample. Moving the sample in a linear direction while rotating the optical assembly allows sensing of an entire sample. Preferably, light from the optical source enters the optical assembly along the axis of rotation. Sensing methods consistent with the invention are also described.

Abstract translation: 用于光学感测样品的装置包括光源，光学组件，样品保持器，物镜和检测器。 物镜准直样品发出的光。 优选地，光学组件围绕轴旋转，允许感测装置感测样品上多个位置的结果，而不移动样品。 旋转光学组件时沿直线方向移动样品可以检测整个样品。 优选地，来自光源的光沿旋转轴进入光学组件。 还描述了与本发明一致的感测方法。

公开(公告)号：US20040075879A1

公开(公告)日：2004-04-22

申请号：US10618766

申请日：2003-07-15

Applicant: Accretech (Israel) Ltd.

Inventor： Jacob Karin

IPC: G02B026/08

CPC classification number: G01N21/956 ,  G01N2201/1047 ,  G02B26/101

Abstract: A scanning system for scanning the surface of a sample. The system includes a scanning head, a mounting arrangement configured for mounting the sample thereon, a drive mechanism configured for providing relative motion between the scanning head and the mounting arrangement, an optical system and an adjustment mechanism. At least part of the optical system is included in the scanning head. The optical system is configured for simultaneously reading from at least two non-overlapping viewing regions of the surface. The adjustment mechanism is configured for adjusting at least part of the optical system so as to vary a spacing of the at least two non-overlapping viewing regions read by the optical system.

Abstract translation: 用于扫描样品表面的扫描系统。 该系统包括扫描头，配置成用于将样品安装在其上的安装装置，构造成用于在扫描头和安装装置之间提供相对运动的驱动机构，光学系统和调节机构。 光学系统的至少一部分被包括在扫描头中。 光学系统被配置为同时从表面的至少两个不重叠的观察区域读取。 调整机构被配置用于调整光学系统的至少一部分，以便改变由光学系统读取的至少两个不重叠的观看区域的间隔。

公开(公告)号：US20030099022A1

公开(公告)日：2003-05-29

申请号：US10159042

申请日：2002-06-03

Applicant: Tokyo Seimitsu (Israel) Ltd.

Inventor： Jacob Karin ,  Arie Shahar ,  Gilad Golan

IPC: G02B026/08

CPC classification number: G01N21/956 ,  G01N2201/1047 ,  Y10S359/90

Abstract: A method to compare similar physical areas of an inspection area using a scanning arrangement. The inspection area has a periodic pattern having a repeat vector. The scanning arrangement has a stage, a drive mechanism and at least one circular scanner. The circular scanner has a scanning head and an axis of rotation about which the scanning head performs a circular scanning motion. The drive mechanism is configured to provide relative movement between the stage and the axis of rotation. The method includes the steps of: scanning the inspection area by a combination of circular scanning of the scanning head and by generating relative movement between the stage and the axis of rotation such that pairs of curved scanning paths are related by an integer multiple of the repeat vector; and comparing at least one of said pairs of the curved scanning paths by a pixel to pixel comparison.

Abstract translation: 使用扫描装置来比较检查区域的类似物理区域的方法。 检查区域具有具有重复向量的周期性图案。 扫描装置具有平台，驱动机构和至少一个圆形扫描仪。 圆形扫描仪具有扫描头和旋转轴，扫描头围绕该旋转轴执行圆形扫描运动。 驱动机构被配置为提供台架和旋转轴线之间的相对移动。 该方法包括以下步骤：通过扫描头的圆形扫描的组合扫描检查区域，并通过产生台与旋转轴之间的相对运动，使得成对的弯曲扫描路径与重复的整数倍相关 向量; 以及通过像素比较比较所述曲线扫描路径对中的至少一个。