公开(公告)号：US20220171253A1

公开(公告)日：2022-06-02

申请号：US17456380

申请日：2021-11-24

Applicant: Topcon Corporation

Inventor： Akira TAKADA

IPC: G02F1/29

Abstract: An optical scanner includes: a light source; a deflection element including a plurality of pixels arranged one-dimensionally or two-dimensionally; a one-cycle diffraction grating including, among the pixels, continuous N pixels, where N is a natural number of two or more; the one-cycle diffraction grating having a length d in the alignment direction that is smaller than a wavelength λ of the light emitted from the light source; and a phase modulation controller configured to control a phase modulation amount of each of the pixels. Incident light is emitted from the light source obliquely from the reflecting surface at an incident angle θ1. Sin θi+(λ/d)>1 or sin θi−(λ/d)>1 is satisfied.

公开(公告)号：US20220291043A1

公开(公告)日：2022-09-15

申请号：US17653645

申请日：2022-03-05

Applicant: Topcon Corporation

Inventor： Akira TAKADA

IPC: G01J3/45 ,  G01J3/02

Abstract: A wavelength-swept light source is configured to generate light to be measured that is wavelength-swept coherent light with a wavelength periodically changed. The light to be measured is separated into a measurement section and a reference section that have different optical path lengths, and is then coupled in an interference section to generate interfering light. An analyzer performs a Fourier transform of interference signals of the interfering light, and acquires an actual measured noise floor value for each of the optical path length differences based on a point spread function. An estimated coherence time is determined so that an actual measured amplitude value of the noise floor value and a calculated amplitude value coincide with each other. Linewidth of the light emitted from the coherent light source is measured based on the estimated coherence time.

公开(公告)号：US20220206164A1

公开(公告)日：2022-06-30

申请号：US17645045

申请日：2021-12-18

Applicant: Topcon Corporation

Inventor： Akira TAKADA

IPC: G01S17/931 ,  G01S7/4911

Abstract: An optical interference measurement device includes: a light source having a wavelength-swept light source that changes a wavelength of emitted light periodically; a light splitter configured to split light emitted from the light source into measurement light and reference light; a measurement section configured to emit the measurement light onto a measurement target; an interference section configured to couple the measurement light reflected or scattered by the measurement target and the reference light together to produce interfering light; a light detector configured to detect the interfering light; and an analyzer configured to analyze an interference signal detected by the light detector. The optical interference measurement device has an optical element in the measurement section, and the optical element is configured to cause an optical loss that makes an amount of light received inversely proportional to a square of a propagation distance.