公开(公告)号：US20100229965A1

公开(公告)日：2010-09-16

申请号：US12722570

申请日：2010-03-12

申请人： Toshihiro KASHIMA ,  Yutaka YONEDA ,  Yasuhiro ISOBE

发明人： Toshihiro KASHIMA ,  Yutaka YONEDA ,  Yasuhiro ISOBE

IPC分类号： G05D7/00 ,  G01F1/76

CPC分类号： G01F1/6847 ,  G01F5/00 ,  G01F25/0007 ,  G05D7/0635 ,  Y10T137/7722 ,  Y10T137/7759 ,  Y10T137/7761

摘要： An object of this invention is to provide a superior mass flow meter or the like that can flexibly cope with a change of a sample fluid such as a gas kind without requiring a special troublesome labor and that can measure a flow rate with high accuracy. The mass flow meter comprises a sensor section that detects a flow rate of a sample fluid flowing in a flow channel, a setting section that sets a flow rate characteristic function that is intrinsic to each fluid to determine a flow rate based on a flow rate detected value output by the sensor section and an instrumental error correction parameter that is independent from the flow rate characteristic function and common to multiple sample fluids to correct an instrumental error of each mass flow meter, and a flow rate calculating section that calculates a flow rate measurement value of the sample fluid by applying the flow rate characteristic function and the instrumental error correction parameter to the flow rate detected value.

摘要翻译： 本发明的一个目的是提供一种能够灵活应对气体样品流体变化的优质的质量流量计等，而不需要特别麻烦的劳动，并可以高精度地测量流量。 质量流量计包括检测在流路中流动的样品流体的流量的传感器部分，设定部分，其设定每个流体固有的流量特性函数，以基于检测到的流量来确定流量 由传感器部分输出的值和与流量特性函数无关并且与多个样本流体共同以校正每个质量流量计的仪器误差的仪器误差校正参数;以及流量计算部分，其计算流量测量 通过将流量特性函数和仪器误差校正参数应用于流量检测值来获得样品流体的值。