摘要:
An apparatus for charging dry air or nitrogen gas into a container for storing semiconductor wafers can remove chemical gas and moisture from the container, and then prevent acid from being generated at the surfaces of the wafers.The apparatus A for charging dry air or nitrogen gas into a container 1 for storing semiconductor wafers 9 is connected to an opening 8a, acting as an intake, and to an opening 8b, acting as an exhaust, wherein the container 1 comprises a plurality of openings 8 disposed at the bottom plate of the container 1, the apparatus comprising:PTFE filters 7 disposed at the plurality of openings 8a, 8b, a portion 11 for providing the dry air or nitrogen gas to the container 1, anda portion 12 for exhausting the used dry air or nitrogen gas from the container 1 after removing chemical gas and moisture from the container, and then preventing acid from being generated at the surfaces of the wafers 9.
摘要:
A remover that removes the static charges on surfaces of substrates of semiconductors and liquid crystals in the processes for manufacturing them is provided. A cylindrical filter in the remover cannot be affected by soft X-rays, and the X-rays cannot leak outside the guiding vessel.A portion 1 for generating purified air that comprises a cylindrical filter 5, a portion 2 for irradiation of soft X-rays 19, and a portion 3 for blowing out the ionized purified air, are arranged in the direction of the air flow in a guiding vessel 4. Also, a shield 23 prevents the portion 1 for generating purified air from being exposed to the irradiation. Further, the portion 3 has a construction wherein the ionized purified air 35 is blown at an equal rate of flow along the longitudinal direction of the remover and prevents the soft X-rays 19 from leaking outside the guiding vessel 4.
摘要:
An apparatus for reducing weight and thickness of portable computers is disclosed. The apparatus includes a lower housing, an upper housing and a cosmetic cover. The lower housing is configured to accommodate electronic elements therein. The upper housing, which has an opening inside, includes a periphery connected to the lower housing and a main bridge structure connected from one edge of the periphery to another edge of the periphery for providing structural support to the upper housing in the opening and for accommodating a display module therein. The cosmetic cover is configured to cover the upper housing.
摘要:
An apparatus for reducing weight and thickness of portable computers is disclosed. The apparatus includes a lower housing, an upper housing and a cosmetic cover. The lower housing is configured to accommodate electronic elements therein. The upper housing, which has an opening inside, includes a periphery connected to the lower housing and a main bridge structure connected from one edge of the periphery to another edge of the periphery for providing structural support to the upper housing in the opening and for accommodating a display module therein. The cosmetic cover is configured to cover the upper housing.