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公开(公告)号:US4967597A
公开(公告)日:1990-11-06
申请号:US336381
申请日:1989-04-11
申请人: Toshitaka Yamada , Tiaki Mizuno , Masahito Imai , Haruyuki Ikeo , Hirohito Sioya , Masahito Muto , Motomi Iyoda
发明人: Toshitaka Yamada , Tiaki Mizuno , Masahito Imai , Haruyuki Ikeo , Hirohito Sioya , Masahito Muto , Motomi Iyoda
IPC分类号: G01P1/00
CPC分类号: G01P1/003
摘要: When an acceleration sensor is used, it is attached to a measured object to detect an acceleration applied to the object. The acceleration sensor includes a package having at least one chamber. A sensor element is disposed in the chamber and has a portion which vibrates in response to the acceleration. Damping liquid is sealed within the package and has a quantity which allows the sensor element to be submerged in the damping liquid and which allows a predetermined quantity of gas to remain in the package. The gas absorbs a thermally-induced volume change of the damping liquid. In the absence of the acceleration, a gas bubble is prevented from separating from the gas. In addition, the gas bubble is prevented from staying in the chamber.