公开(公告)号：US20110159701A1

公开(公告)日：2011-06-30

申请号：US12973043

申请日：2010-12-20

申请人： Tsunenaga NAKASHIMA ,  Shinichi HAYASHI ,  Akihiro FUJIMOTO ,  Takahiro OOKUBO

发明人： Tsunenaga NAKASHIMA ,  Shinichi HAYASHI ,  Akihiro FUJIMOTO ,  Takahiro OOKUBO

IPC分类号： H01L21/312 ,  B05C5/00

CPC分类号： B05C5/0237 ,  B05C5/0225 ,  B05C13/02 ,  G03F7/162

摘要： The present disclosure provides a chemical liquid supply nozzle capable of suppressing the drying process of chemical liquid with a low cost. The chemical liquid supply nozzle is provided with a cutoff valve and a suction unit that sucks chemical liquid to a suction flow path at a nozzle main body connected to a front end of flow path member. Accordingly, the chemical liquid remaining at the downstream side of the cutoff valve after the chemical liquid is discharged, is sucked toward the upstream side of the cutoff valve and removed, to thereby suppress the drying and solidifying process of the chemical liquid at the chemical liquid flow path. Also, there is no need to block the chemical liquid flow path by sucking thinner at the downstream side of chemical liquid flow path, and the number of dummy dispense may be reduced, thereby reducing an overall operation cost of the process.

摘要翻译： 本公开提供了能够以低成本抑制化学液体的干燥过程的化学液体供给喷嘴。 化学液体供给喷嘴设置有切断阀和吸引单元，该吸引单元将化学液体吸附到与流路构件的前端连接的喷嘴主体处的吸入流路。 因此，在排出药液之后残留在截止阀的下游侧的化学液体被吸向截止阀的上游侧并除去，从而抑制药液的化学液的干燥和固化过程 流路。 此外，不需要通过在化学液体流动路径的下游侧吸取稀薄剂来阻止化学液体流动路径，并且可以减少虚拟分配的数量，从而降低了处理的整体操作成本。