公开(公告)号：US07070490B2

公开(公告)日：2006-07-04

申请号：US10109015

申请日：2002-03-28

申请人： Tzu-Shin Chen ,  Ming-Hsing Kao ,  Wen-Chin Lin ,  Hua-Bin Chi

发明人： Tzu-Shin Chen ,  Ming-Hsing Kao ,  Wen-Chin Lin ,  Hua-Bin Chi

IPC分类号： B24B5/00

CPC分类号： B24B37/30 ,  B25B11/005 ,  H01L21/6838

摘要： A membrane for vacuum suction of a silicon water typically used inside a polishing head. The membrane has a flat main body and a plurality of protrusions each having a spiny shape over the surface of the flat main body. The protrusions are formed in positions that correspond to the holes of a supporting multiple-hole panel. The protrusions on the flat main body lower the suction pressure between the wafer and the membrane somewhat so that wafer unloading failure is minimized.

摘要翻译： 通常用于抛光头内部的硅水的真空抽吸膜。 膜具有扁平主体和多个突起，每个突起在平坦主体的表面上具有多晶形状。 突起形成在与支撑多孔板的孔相对应的位置。 扁平主体上的突起稍微降低了晶片和膜之间的吸入压力，使得晶片卸载故障最小化。