公开(公告)号：US20240058839A1

公开(公告)日：2024-02-22

申请号：US18360950

申请日：2023-07-28

Applicant: ULVAC, INC.

Inventor： Shunsuke SASAKI ,  Takahito KIMOTO ,  Yoshiaki FUKUDA ,  Ken MAEHIRA

IPC: B05D1/28

CPC classification number: B05D1/28

Abstract: A vacuum treatment apparatus including: a first wind-off roller paying out a first base material; a first wind roller winding the first base material; a main roller having an outer circumferential surface in contact with a non-film deposition surface, and winding and conveying the first base material, at least a part of the outer circumferential surface, which is uncovered with the first base material, being coated with an insulating material; a deposition source facing the outer circumferential surface of the main roller; a second wind-off roller paying out a second base material that is wound and conveyed by the main roller and covers a part of a film deposition surface of the first base material on the outer circumferential surface of the main roller; a second wind roller winding the second base material; and a power source applying a bias potential to the main roller.

公开(公告)号：US20240067480A1

公开(公告)日：2024-02-29

申请号：US18361293

申请日：2023-07-28

Applicant: ULVAC, INC.

Inventor： Yoshiaki FUKUDA ,  Shunsuke SASAKI ,  Takahito KIMOTO ,  Michinari SUGIMURA

IPC: B65H18/20 ,  B65H23/038

CPC classification number: B65H18/20 ,  B65H23/038 ,  B65H2404/1362 ,  B65H2553/27

Abstract: In a present vacuum treatment apparatus, a controller controls an auxiliary roller, a thermometer, a power source, and a temperature control mechanism, in which the controller detects a temperature of a base material wound and conveyed by a main roller, starts film deposition to form a film deposition material on the base material when the temperature of the base material is in a film deposition temperature range, adjusts, when the temperature of the base material is out of a threshold range after starting film deposition on the base material, the temperature of the main roller so that the temperature of the base material falls within the threshold range and adjusts an adhesion force between the main roller and the base material, and continues the film deposition of the film deposition material on the base material with the temperature of the base material in the film deposition temperature range.