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1.发明授权Procedure and equipment for the automatic focussing of the charge carrier beam in devices for the working of materials by means of a charge carrier beam 失效用于通过电荷载流子束将电荷载体束自动聚焦在用于材料加工的装置中的步骤和设备
公开(公告)号：US3291959A
公开(公告)日：1966-12-13
申请号：US23986462
申请日：1962-11-09
Applicant: UNITED AIRCRAFT CORP
Inventor： FRITZ SCHLEICH , JUSTUS SIENKNECHT
CPC classification number: B23K15/0013 , H01J37/21
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