-
公开(公告)号:US20250151366A1
公开(公告)日:2025-05-08
申请号:US18531679
申请日:2023-12-06
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Zi-Ting Huang , Ching-Ling Lin , Wen-An Liang
IPC: H01L29/423 , H01L29/66 , H01L29/78
Abstract: A method for fabricating semiconductor device includes the steps of first providing a substrate having a core region and an input/output (I/O) region and then forming a first metal gate on the core region and a second metal gate on the I/O region. Preferably, the first metal gate includes a first gate dielectric layer, the second metal gate includes a second gate dielectric layer, the first gate dielectric layer and the second gate dielectric layer having different shapes such that the first gate dielectric layer includes an I-shape and the second gate dielectric layer includes a U-shape.