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公开(公告)号:US10249357B1
公开(公告)日:2019-04-02
申请号:US15821762
申请日:2017-11-23
发明人: Wen-Chin Lin , Jhih-Yuan Chen , Syue-Ren Wu , Meng-Hsun Wu
IPC分类号: G11C11/24 , G11C11/403 , H01L27/108
摘要: A semiconductor device includes a substrate having a memory region and a peripheral region defined thereon, wherein the peripheral region comprises at least one transistor, the memory region comprises a plurality of memory cells, each memory cell comprises at least one gate structure and a capacitor structure, a mask layer disposed on the capacitor structure in the memory region, and a dielectric layer disposed on the substrate within the peripheral region, wherein a top surface of the dielectric layer is aligned with a top surface of the mask layer.