公开(公告)号：US09279923B2

公开(公告)日：2016-03-08

申请号：US13850297

申请日：2013-03-26

Applicant: UNITED MICROELECTRONICS CORPORATION

Inventor： Cheng-Hung Yu

IPC: G02B5/22 ,  G02B5/20 ,  G03F7/00

CPC classification number: G02B5/201 ,  G03F7/0007

Abstract: A method for fabricating a color filter layer, which is applied to an integrated circuit manufacturing process, includes the following steps. Firstly, a substrate is provided, and a groove structure is formed on the substrate. The groove structure includes a plurality of positive photoresist patterns and a plurality of trenches. Then, a first group of color filter patterns is formed in the trenches. The plurality of positive photoresist patterns is removed, so that a portion of a top surface of the substrate is exposed. Then, a second group of color filter patterns is formed on the exposed top surface of the substrate.

Abstract translation: 应用于集成电路制造工艺的制造滤色器层的方法包括以下步骤。 首先，设置基板，在基板上形成槽结构。 凹槽结构包括多个正光致抗蚀剂图案和多个沟槽。 然后，在沟槽中形成第一组滤色器图案。 去除多个正光致抗蚀剂图案，使得基板的顶表面的一部分被暴露。 然后，在曝光的基板的顶表面上形成第二组滤色器图案。

公开(公告)号：US09070612B2

公开(公告)日：2015-06-30

申请号：US14089716

申请日：2013-11-25

Applicant: UNITED MICROELECTRONICS CORPORATION

Inventor： Cheng-Hung Yu

IPC: H01L21/00 ,  H01L27/146

CPC classification number: H01L27/14685 ,  H01L27/14618 ,  H01L27/14625 ,  H01L27/14627 ,  H01L2924/0002 ,  Y10T29/49 ,  H01L2924/00

Abstract: A method for fabricating an image sensor, wherein the method comprises steps as follows: Firstly, a transparent substrate is formed on a working substrate. Pluralities of micro lens are formed in the transparent substrate, wherein the lenses have a refraction ratio differing from that of the transparent substrate. Subsequently, a color filter is formed on the lenses. Afterward, the color filter is engaged with an image sensing device by flipping around the working substrate.

Abstract translation: 一种图像传感器的制造方法，其特征在于，包括以下步骤：首先，在工作基板上形成透明基板。 多个微透镜形成在透明基板中，其中透镜具有与透明基板不同的折射率。 随后，在透镜上形成滤色器。 之后，通过在工作基板周围翻转，滤色器与图像感测装置接合。