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公开(公告)号:US11387403B2
公开(公告)日:2022-07-12
申请号:US16628299
申请日:2018-07-05
发明人: Libor Rufer , Skandar Basrour , Emilie Trioux , Guillaume Férin , Claire Bantignies , Hung Le Khanh , Bogdan Rosinski , An Nguyen-Dinh
IPC分类号: H01L41/09 , H01L41/113 , H01L41/083 , H01L41/27 , H02N2/18
摘要: A piezoelectric bimorph cantilever beam system includes a shim having a first main surface, a second main surface opposite the first main surface, a proximal end connected to an anchor, and a distal end opposite the proximal end. The system further includes a first piezoelectric layer laminated on the first main surface of the shim and a second piezoelectric layer laminated on the second main surface of the shim. A first beam stiffener is provided over the first main surface of the shim adjacent to the anchor with the first beam stiffener at least partially covering the first piezoelectric layer. A second beam stiffener is provided over the second main surface of the shim adjacent to the anchor with the second beam stiffener at least partially covering the second piezoelectric layer.