公开(公告)号：US20150338337A1

公开(公告)日：2015-11-26

申请号：US14758898

申请日：2014-01-06

申请人： UNIVERSITY OF LIMERICK ,  LASERSPEC

发明人： Christophe Silien ,  Ning Liu ,  Andre Peremans ,  David Symens ,  Syed A., M. Tofail

IPC分类号： G01N21/25 ,  G02B21/00 ,  G02B27/58

CPC分类号： G01N21/255 ,  G02B21/0072 ,  G02B21/0076 ,  G02B27/58

摘要： The invention provides a method and system to record the absorption of a sample, said method comprising the steps of providing first and second pulsed beam of light on said sample using one or more light beams, said first and second pulsed beam having different spatial definition; measuring the difference in intensity transmitted through and/or reflected by a sample; and generating an image by scanning the sample while making such measurements. The system and method of the invention can work down to resolution of several 100 of nm, affording thus a large improvement in comparison to synchrotron IR imaging that is the closest technique existing today. The advantage versus scanning probe approach is the absence of physical probe, thus suppressing confinement to surface information and removing uncertainty regarding the working behaviour of the probe.

摘要翻译： 本发明提供了一种记录样品吸收的方法和系统，所述方法包括以下步骤：使用一个或多个光束在所述样品上提供第一和第二脉冲光束，所述第一和第二脉冲光束具有不同的空间定义; 测量样品透过和/或反射的强度差异; 以及通过在进行这种测量的同时扫描样品来生成图像。 本发明的系统和方法可以降低几百nm的分辨率，从而与现在最近存在的最接近的技术的同步加速器IR成像技术相比提供了很大的改进。 扫描探针方法的优点是没有物理探针，因此抑制了对表面信息的限制，并消除了探头工作特性的不确定性。